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Communication Dans Un Congrès Année : 2020

MEMS micro loudspeaker: technology, integration and in-ear applications

Résumé

MEMS technology is an enabler in the microelectronics industry for supporting ever increasing computing power and connectivity with sensors and actuators for interacting with the environment and users; as an example, MEMS microphones are enabling the invention of new devices and user interfaces not possible before. In the same ecosystem and with similar goals USound is developing MEMS micro speakers. The availability of piezo thin films on silicon substrates is one of the enabling technologies that allow for the design of large force, large displacement, linear actuators; the silicon actuator is mounted on a substrate and combined through a pick and place process with an acoustic membrane to generate sound. Compared to standard micro speakers, MEMS speakers are thin, light and reflow solderable, this enables for the next step in digital devices integration and SMT manufacturing. Main topic of the presentation is a fully integrated audio module including mechanics, acoustics and electronics; the approach for integrating heterogenous components is similar to the integration concepts applied to camera modules for smartphones. These technologies are well in line with roadmaps for in-ear headphones, wired or wireless; for wearables like smart glasses; for array arrangement in smart speakers; for array arrangement in 3D sound headphones and more to come in the future.

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Dates et versions

hal-03231963 , version 1 (26-05-2021)

Identifiants

Citer

Andrea Rusconi. MEMS micro loudspeaker: technology, integration and in-ear applications. Forum Acusticum, Dec 2020, Lyon, France. pp.2903-2903, ⟨10.48465/fa.2020.0071⟩. ⟨hal-03231963⟩
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