Network hydration, ordering and composition interplay of chemical vapor deposited amorphous silica films from tetraethyl orthosilicate - Archive ouverte HAL Access content directly
Journal Articles Journal of Materials Research and Technology Year : 2021

Network hydration, ordering and composition interplay of chemical vapor deposited amorphous silica films from tetraethyl orthosilicate

Hugues Vergnes
Brigitte Caussat
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hal-03231610 , version 1 (20-05-2021)

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Babacar Diallo, Konstantina C Topka, Maxime Puyo, Charlotte Lebesgue, Cecile Genevois, et al.. Network hydration, ordering and composition interplay of chemical vapor deposited amorphous silica films from tetraethyl orthosilicate. Journal of Materials Research and Technology, 2021, ⟨10.1016/j.jmrt.2021.04.067⟩. ⟨hal-03231610⟩
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