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Communication Dans Un Congrès Année : 2017

Near-Field Scanning Millimeter-wave Microscope Combined with a Scanning Electron Microscope

Résumé

The design, fabrication and experimental validation of a novel near-field scanning millimeter-wave microscope (NSMM) built inside a scanning electron microscope (SEM) is presented. The instrument developed can perform hybrid characterizations by providing simultaneously atomic force, complex microwave impedance and electron microscopy images of a sample with nanometer spatial resolution. By combining the measured data, the system offers unprecedentable capabilities for tackling the issue between spatial resolution and high frequency quantitative measurements.
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Dates et versions

hal-03224653 , version 1 (11-05-2021)

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  • HAL Id : hal-03224653 , version 1

Citer

Gilles Dambrine, Kamel Haddadi, Olaf C. Haenssler, Christophe Boyaval, Didier Theron. Near-Field Scanning Millimeter-wave Microscope Combined with a Scanning Electron Microscope. IEEE-Microwave-Theory-and-Techniques-Society International Microwave Symposium, IMS 2017, Jun 2017, Honolulu, HI, United States. pp.1656-1659. ⟨hal-03224653⟩
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