This paper proposes a jitter aware decoupling placement optimization method for capacitors that uses the genetic algorithm (GA). In addition, a novel method for defining the optimization target function in regard to power delivery network (PDN) optimization based on the GA-based tool is proposed. The proposed method can provide an optimum and economic solution for the number of decoupling capacitors to use in a power delivery network (PDN). In addition, by modifying the optimization target function with our proposed method, an optimum solution regarding both the number of decoupling capacitors and the power source induced jitter (PSIJ) can be obtained. The PSIJ analytical expressions are derived in conjunction with a resonant cavity model that includes the coordinates of the decoupling capacitors and the PSIJ transfer function. The GAbased optimization algorithm with the proposed target function is first applied to optimize the number of decoupling capacitors, and then, the PSIJ is taken into account. A comparison between these two cases is made, with the results proving the efficiency of our proposed method. Finally, the measured jitter from HSPICE simulation results is used to verify our optimization method, such that both the simulated results and analytically calculated results support the efficiency of our proposed optimization method.