Optical interferometry on lateral porous silicon
Résumé
We demonstrate the transducing ability of lateral porous silicon membranes (LPSi) using optical interferometry. To this aim, we use a Fourier Transform Infra-Red spectrometer (FTIR) coupled to a microscope stage equipped with an appropriate objective in order to overcome the difficulty to obtain interference signal from the LPSi membrane with small dimensions. We have recorded reflectance spectra upon filling the membrane with various solvents and the observed shifts of Fabry-Pérot fringe patterns indicate that the we are able to differentiate between solvents, thus providing a proof-of-concept of the LPSi interferometric transducer.
Domaines
Sciences de l'ingénieur [physics]| Origine | Fichiers produits par l'(les) auteur(s) |
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