Hydrogen Selective Gas Sensor Based on Attenuation Measurement of Acoustic Wave Using Uncoated CMUT - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2021
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hal-03205733 , version 1 (22-04-2021)

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Luis Iglesias Hernandez, Priyadarshini Shanmugam, Jean-Francois Michaud, Daniel Alquier, Dominique Certon, et al.. Hydrogen Selective Gas Sensor Based on Attenuation Measurement of Acoustic Wave Using Uncoated CMUT. 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2021, Gainesville, United States. pp.398-401, ⟨10.1109/MEMS51782.2021.9375432⟩. ⟨hal-03205733⟩
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