High-sensitivity mass and position detection of the micro-objects adhered to the afm cantilevers - Archive ouverte HAL
Article Dans Une Revue Journal of Micro-Nano Mechatronics Année : 2008

High-sensitivity mass and position detection of the micro-objects adhered to the afm cantilevers

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hal-03191008 , version 1 (06-04-2021)

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  • HAL Id : hal-03191008 , version 1

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Hui Xie, Julien Vitard, Sinan Haliyo, Stéphane Régnier. High-sensitivity mass and position detection of the micro-objects adhered to the afm cantilevers. Journal of Micro-Nano Mechatronics, 2008, 4 (1-2), pp.17-25. ⟨hal-03191008⟩
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