Ultra-low loss ridge waveguides on lithium niobate via argon ion milling and gas clustered ion beam smoothening - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Optics Express Année : 2018

Ultra-low loss ridge waveguides on lithium niobate via argon ion milling and gas clustered ion beam smoothening

Résumé

Lithium niobate's use in integrated optics is somewhat hampered by the lack of a capability to create low loss waveguides with strong lateral index confinement. Thin film single crystal lithium niobate is a promising platform for future applications in integrated optics due to the availability of a strong electro-optic effect in this material coupled with the possibility of strong vertical index confinement. However, sidewalls of etched waveguides are typically rough in most etching procedures, exacerbating propagation losses. In this paper, we propose a fabrication method that creates significantly smoother ridge waveguides. This involves argon ion milling and subsequent gas clustered ion beam smoothening. We have fabricated and characterized ultra-low loss waveguides with this technique, with propagation losses as low as 0.3 dB/cm at 1.55 mu m.
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Origine : Publication financée par une institution
Licence : CC BY - Paternité

Dates et versions

hal-03183505 , version 1 (11-07-2022)

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Paternité

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Shawn Yohanes Siew, Eric Jun Hao Cheung, Haidong Liang, Andrew Bettiol, Noriaki Toyoda, et al.. Ultra-low loss ridge waveguides on lithium niobate via argon ion milling and gas clustered ion beam smoothening. Optics Express, 2018, 26 (4), pp.4421-4430. ⟨10.1364/OE.26.004421⟩. ⟨hal-03183505⟩
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