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Article Dans Une Revue Advances in Science, Technology and Engineering Systems Journal Année : 2020

Fabrication and optimization of high frequency ZnO transducers for both longitudinal and shear emission: application of viscosity measurement using ultrasound

Résumé

This paper covers the study of high-frequency (~ 1 GHz) ZnO piezoelectric transducer integrated on a silicon substrate able to generate both compressional and shear acoustic waves. First, to promote the longitudinal mode, an electrical matching of the transducer in this high-frequency range is effectuated. Second, to promote shear waves, new deposition conditions were applied, giving thin zinc oxide films of inclined c-axis. The RF microprobe was used to validate the transducer design and to conduct the viscosity measurements. Thus, the shear and the volume viscosity of a water droplet were measured.
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Dates et versions

hal-03129037 , version 1 (02-02-2021)

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Hatem Dahmani, Ibrahim Zaaroura, Abbas Salhab, Pierre Campistron, Julien Carlier, et al.. Fabrication and optimization of high frequency ZnO transducers for both longitudinal and shear emission: application of viscosity measurement using ultrasound. Advances in Science, Technology and Engineering Systems Journal, 2020, 5 (6), pp.1428-1435. ⟨10.25046/aj0506173⟩. ⟨hal-03129037⟩
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