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Article Dans Une Revue Optics Express Année : 2020

Proposal for an integrated silicon-photonics terahertz gas detector using photoacoustics

Résumé

A design and multiphysical model is presented for an on-chip gas sensor that transduces terahertz gas absorption through sound generation into a mechanical motion that can be read out externally. The signal is triply enhanced by designing a structure that functions simultaneously as an optical, an acoustical and a mechanical resonator. The structure is made in high-resistivity silicon and can be fabricated using CMOS and MEMS fabrication technologies. The sensor is a purely passive element, so an external THz source and read-out are required. The chip has a footprint of 3 mm 2. A detection limit of 234 ppb of methanol for a source power of 1 mW and an integration time of 1 ms is predicted.
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Dates et versions

hal-03065114 , version 1 (14-12-2020)

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Mattias Verstuyft, Elias Akiki, Benjamin Walter, Marc Faucher, Jean-Francois Lampin, et al.. Proposal for an integrated silicon-photonics terahertz gas detector using photoacoustics. Optics Express, 2020, 28 (15), pp.22424. ⟨10.1364/OE.397272⟩. ⟨hal-03065114⟩
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