Study of Cr5Si3 electrodes on langasite surface acoustic wave resonators for high temperature sensing - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2018

Study of Cr5Si3 electrodes on langasite surface acoustic wave resonators for high temperature sensing

Résumé

Many piezoelectric materials are viewed as potential candidates for high temperature SAW applications, including langasite (LGS) and AlN. Only a few metals or alloys can withstand such temperatures, among them platinum and iridium based alloys or nanocomposites. These materials cannot be considered when high quality factors are required, due to their higher resistivity and density. The (Cr, V)-Si system was previously studied, but has never been proposed as a solution for SAW electrodes, in spite of its high thermal stability, lower density (about 6 g/cm 3) and decent resistivity. This study focuses on the development of Cr5 Si3 alloy deposition for its use in LGS-based resonators, aiming at wireless applications.
Fichier principal
Vignette du fichier
Poster CrSi IUS final.pdf (3.48 Mo) Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)

Dates et versions

hal-03032746 , version 1 (01-12-2020)

Identifiants

  • HAL Id : hal-03032746 , version 1

Citer

J Streque, M.-A Soussou, F Bartoli, Sami Hage-Ali, A Taguett, et al.. Study of Cr5Si3 electrodes on langasite surface acoustic wave resonators for high temperature sensing. IEEE International Ultrasonics Symposium 2018, Oct 2018, Kobe, Japan. ⟨hal-03032746⟩
60 Consultations
13 Téléchargements

Partager

Gmail Facebook X LinkedIn More