Modelling and analysis of the stress distribution in a multi-thin film system Pt/USG/Si - Archive ouverte HAL
Journal Articles Materials Research Express Year : 2018

Modelling and analysis of the stress distribution in a multi-thin film system Pt/USG/Si

Wei-Zhen Yao
  • Function : Author
Mécanique des Matériaux et Procédés
F Roqueta
  • Function : Author
STMicroelectronics [Tours]
J Craveur
  • Function : Author
S Belhenini
  • Function : Author
P Gardes
  • Function : Author
Abdellah Tougui
  • Function : Author
Mécanique des Matériaux et Procédés

Domains

Materials and structures in mechanics [physics.class-ph] Mechanics of materials [physics.class-ph] Solid mechanics [physics.class-ph] Structural mechanics [physics.class-ph]

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https://hal.science/hal-02972471

Submitted on : Tuesday, October 20, 2020-2:03:15 PM

Last modification on : Wednesday, September 11, 2024-2:10:03 PM

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hal-02972471 , version 1 (20-10-2020)

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Wei-Zhen Yao, F Roqueta, J Craveur, S Belhenini, P Gardes, et al.. Modelling and analysis of the stress distribution in a multi-thin film system Pt/USG/Si. Materials Research Express, 2018, 5 (4), pp.046405. ⟨10.1088/2053-1591/aaba4b⟩. ⟨hal-02972471⟩

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