‘Impact of microwave annealing on CeO2 thin films sputtered on (111) Si '

T. Toloshniak; Y. Guhel; J. Bernard; A. Besq; S. Marinel; B. Boudart

Journal Articles Materials Research Bulletin Year : 2015

‘Impact of microwave annealing on CeO2 thin films sputtered on (111) Si '

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1

T. Toloshniak

Function : Author

Y. Guhel

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Laboratoire Universitaire des Sciences Appliquées de Cherbourg

J. Bernard

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A. Besq

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S. Marinel

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B. Boudart

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Engineering Sciences [physics]

Yannick Guhel : Connect in order to contact the contributor

https://hal.science/hal-02936080

Submitted on : Friday, September 11, 2020-12:48:26 AM

Last modification on : Wednesday, March 9, 2022-2:14:03 PM

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hal-02936080 , version 1 (11-09-2020)

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HAL Id : hal-02936080 , version 1

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T. Toloshniak, Y. Guhel, J. Bernard, A. Besq, S. Marinel, et al.. ‘Impact of microwave annealing on CeO2 thin films sputtered on (111) Si '. Materials Research Bulletin, 2015. ⟨hal-02936080⟩

‘Impact of microwave annealing on CeO2 thin films sputtered on (111) Si '

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