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Communication Dans Un Congrès Année : 2016

Printed MEMS : alternative technology to silicon technology for sensors, actuators or energy harvesters processingy

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hal-02906844 , version 1 (25-07-2020)

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  • HAL Id : hal-02906844 , version 1

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Hélène Debéda. Printed MEMS : alternative technology to silicon technology for sensors, actuators or energy harvesters processingy. Department of mechanical Engineering, University of Waterloo, Mar 2016, Waterloo, Canada. ⟨hal-02906844⟩
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