Silicon-Based Monolithic Planar Micro Thermoelectric Generator Using Bonding Technology - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Journal of Microelectromechanical Systems Année : 2017

Silicon-Based Monolithic Planar Micro Thermoelectric Generator Using Bonding Technology

Résumé

A technology of planar micro thermoelectric generators (μTEGs) with double thermal deflections is presented in this letter. We focus on the development of an original technic of bonding pillars etched on a first silicon wafer onto the fragile membranes of a second silicon wafer. The monolithic devices realized are able to convert waste heat into electrical power. The maximum output power for a live-membranes-based μ TEG is 12.3 μ W/cm², for an input power of 2 W/cm² . This kind of μ TEG has a high thermal resistance. It is deduced to be 44.3 K/W, which allows a heat adaptation to any environment with a high thermal resistance.
Fichier non déposé

Dates et versions

hal-02906726 , version 1 (25-07-2020)

Identifiants

Citer

Katir Ziouche, Zheng Yuan, Pascale Lejeune, Tuami Lasri, Didier Leclercq, et al.. Silicon-Based Monolithic Planar Micro Thermoelectric Generator Using Bonding Technology. Journal of Microelectromechanical Systems, 2017, 26 (1), pp.45-47. ⟨10.1109/JMEMS.2016.2633442⟩. ⟨hal-02906726⟩
33 Consultations
0 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More