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Article Dans Une Revue Review of Scientific Instruments Année : 2020

A Photonic Atom Probe coupling 3D Atomic Scale Analysis with in situ Photoluminescence Spectroscopy

Jonathan Houard
Antoine Normand
Christian Bacchi
G Beainy
Simona Moldovan
Gérald da Costa
Fabien Delaroche
Charly Vaudolon
D Blavette
Bernard Deconihout
Angela Vella
François Vurpillot
Lorenzo Rigutti

Résumé

Laser enhanced field evaporation of surface atoms in Laser-assisted Atom Probe Tomography (La-APT) can simultaneously excite phtotoluminescence in semiconductor or insulating specimens. An atom probe equipped with appropriate focalization and collection optics has been coupled with an in-situ micro-Photoluminescence (µPL) bench that can be operated during APT analysis. The Photonic Atom Probe instrument we have developped operates at frequencies up to 500 kHz and is controlled by 150 fs laser pulses tunable in energy in a large spectral range (spanning from deep UV to near IR). Micro-PL spectroscopy is performed using a 320 mm focal length spectrometer equipped with a CCD camera for time-integrated and with a streak camera for time-resolved acquisitions. An exemple of application of this instrument on a multi-quantum well oxide heterostructure sample illustrates the potential of this new generation of tomographic atom probe.
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Dates et versions

hal-02902892 , version 1 (20-07-2020)

Identifiants

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Jonathan Houard, Antoine Normand, Enrico Di Russo, Christian Bacchi, P Dalapati, et al.. A Photonic Atom Probe coupling 3D Atomic Scale Analysis with in situ Photoluminescence Spectroscopy. Review of Scientific Instruments, 2020, 91, pp.083704. ⟨10.1063/5.0012359⟩. ⟨hal-02902892⟩
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