Modeling and experimental characterization of an active MEMSbased force sensor
Résumé
Active force sensors are based on the principle of force balancing using a feedback control. They allow, unlike passive
sensors, the static characterization of forces without interference of the sensor mechanical properties on the estimated
stiffness of the object to be studied. This capability is fundamental when dealing with the mechanical characterization of
samples
Q1
having a wide range of stiffness. This paper deals with the modeling and the experimental characterization of a
new active MEMS based force sensor. This sensor includes
Q2
folded-flexure type suspensions and a differential comb drive
actuation allowing a linear force/voltage relationship. A control oriented electromechanical model is proposed and validated
experimentally in static and dynamic operating modes using a stroboscopic measurement system. This work is a first step
towards new MEMS active force sensor with high resonant frequency (>2kHz) and high linear measurement force range
(50 μN). The advantage of this structure is to be able to change the sensor operating point without changing the sensor
dynamics. Thus simplifying the control law. Modifying the operating point allows performing an accurate self positioning
of the probe
Q3
in close proximity to the surface to be studied
Origine | Fichiers produits par l'(les) auteur(s) |
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