X-Ray Photoelectron Spectroscopy Estimation of Cobalt Seed Layer Reactivity Toward Air Exposure: A Challenge? - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2020

X-Ray Photoelectron Spectroscopy Estimation of Cobalt Seed Layer Reactivity Toward Air Exposure: A Challenge?

Louis M. Caillard
  • Fonction : Auteur
Mikailou Thiam
  • Fonction : Auteur
Frédéric Raynal
  • Fonction : Auteur
Nathalie Simon
  • Fonction : Auteur
A. M. Gonçalves
  • Fonction : Auteur
Mathieu Frégnaux
A. Etcheberry

Résumé

The impact of the air-exposure of an electroplated cobalt film has been investigated to assess the effect of oxygen interaction on metallic cobalt surface. XPS is used in order to evaluate the Co2p spectra of different time air exposure. We demonstrate that the oxidation start very quickly and then is stabilized toward a limited oxide thickness. Dipping oxidized electrodeposited Co film in two acidic solutions (HCl 1M and Kari

Domaines

Matériaux
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Dates et versions

hal-02867465 , version 1 (14-06-2020)

Identifiants

Citer

Amine Lakhdari, Louis M. Caillard, Dominique Suhr, Mikailou Thiam, Frédéric Raynal, et al.. X-Ray Photoelectron Spectroscopy Estimation of Cobalt Seed Layer Reactivity Toward Air Exposure: A Challenge?. 237th ECS Meeting with the 18th International Meeting on Chemical Sensors, IMCS 2020, 2020, Montreal, Canada. pp.149-156, ⟨10.1149/09701.0149ecst⟩. ⟨hal-02867465⟩
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