Temperature compensated magnetic field sensor based on Love waves - Archive ouverte HAL
Journal Articles Smart Materials and Structures Year : 2020

Temperature compensated magnetic field sensor based on Love waves

Michel Hehn
Prince Mengue
Daniel Lacour
Karine Dumesnil
S. Petit-Watelot
Aurélien Mazzamurro
  • Function : Author
Sami Hage-Ali
Omar Elmazria

Abstract

A temperature compensated magnetic field sensor based on the combination of CoFeB ferromagnetic thin films and Quartz/ZnO Love waveguide platform is developed and optimized. The Love wave is a shear horizontal guided wave and therefore provides an optimal interaction with magnetisation in the magneto-elastic thin film resulting in higher acoustic wave magneto-elastic coupling compared to the conventional Rayleigh wave based devices. ST-cut Quartz was chosen as substrate, ZnO as insulating layer for Love wave generation and temperature coefficient of frequency (TCF) compensation and CoFeB as the magnetostrictive layer sensitive to magnetic field. Experimental results show a magneto-acoustic sensitivity of 15.53 MHz/T with almost zero TCF.
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Dates and versions

hal-02865495 , version 1 (11-06-2020)

Identifiers

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Harshad Mishra, Jérémy Streque, Michel Hehn, Prince Mengue, Hamid M'Jahed, et al.. Temperature compensated magnetic field sensor based on Love waves. Smart Materials and Structures, 2020, 29 (4), pp.045036. ⟨10.1088/1361-665X/ab7857⟩. ⟨hal-02865495⟩
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