Oxygen metastable molecule densities in inductively-coupled plasmas in pure O2 measured by VUV absorption
Résumé
Oxygen molecules possess two metastable states (a 1g at 0.98 eV and b 1 1.64 eV). Models have suggested that both can play an important role in the kinetics plasmas in pure O2 at low pressures[1]. We have used the DESIRS vacuum ultraviolet beamline and Fourier-Transform spectrometer at Synchrotron Soleil to record the absorption spectra of inductively-coupled plasmas (ICP) in pure O2, giving the absolute line densities of O2 in the X, a and b states as a function of gas pressure (5-50 mTorr) and injected RF power (50-500W).