Kinetics of metastable states and atoms in DC discharges in pure O<SUB>2</SUB>: an experimental study - Archive ouverte HAL
Poster De Conférence Année : 2017

Kinetics of metastable states and atoms in DC discharges in pure O2: an experimental study

Jean-Paul Booth
Olivier Guaitella
N. de Oliveira
  • Fonction : Auteur
Laurent Nahon
Colin Western
  • Fonction : Auteur
Sergey Zyryanov
  • Fonction : Auteur
Dmitry Lopaev
  • Fonction : Auteur

Résumé

A comprehensive study of DC discharges in pure O2 gas in a Pyrex tube is presented using a range of diagnostics. Fourier-transform vacuum ultraviolet absorption spectroscopy (FT-VUVAS) provided high-resolution (106) spectra in the region 120-170 nm of O2 (X), O2 (a), O2 (b) and ground state O atoms, allowing their absolute densities to be determined. Optical Emission Spectroscopy (OAS) was used to determine the gas temperature from the O2 (bX) emission spectrum. Time-resolved OAS of partially-modulated discharges was used to probe the loss rates of O2 (b) and of O atoms. From these measurements the surface loss coefficients of these species can be determined, as well as the rate constants for electron impact dissociation of O2. A remarkable increase in the surface loss coefficient on Pyrex of O2 (b) and O atoms is observed at low pressures, corresponding to the onset of energetic ion bombardment.
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Dates et versions

hal-02611361 , version 1 (18-05-2020)

Identifiants

  • HAL Id : hal-02611361 , version 1

Citer

Jean-Paul Booth, Abhyuday Chatterjee, Olivier Guaitella, N. de Oliveira, Laurent Nahon, et al.. Kinetics of metastable states and atoms in DC discharges in pure O2: an experimental study. REACPLAS Workshop (reactivity, Plasmas, Astrophysics), Nov 2017, Orsay, France. 2017. ⟨hal-02611361⟩
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