Highly vibrationally excited O2 molecules in low pressure oxygen plasmas: 2. Self-consistent model
Résumé
The high degree of vibraitonal excitation of O2(X) molecules recently observed in ICP discharges is investigated and interpreted using a detailed self-consistent 0D global model for oxygen plasmas. The theoretical calculations are compared with measurements performed at 10 and 80 mTorr. The origin of these highly excited molecules is explained on the basis of creation and destruction rates of the most important processes for the vibration, controlled by eV, VT O2-O and e O2(X,v)O O processes.