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Communication Dans Un Congrès Année : 2009

Absorption spectroscopy diagnostics of a dual-frequency capacitive dielectric etch tool using Ultraviolet Light-Emitting Diodes

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hal-02595162 , version 1 (15-05-2020)

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  • HAL Id : hal-02595162 , version 1

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Jérôme Bredin, Jean-Paul Booth. Absorption spectroscopy diagnostics of a dual-frequency capacitive dielectric etch tool using Ultraviolet Light-Emitting Diodes. Gaseous Electronics Conference, Oct 2009, Saratoga Springs, New York, United States. ⟨hal-02595162⟩
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