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Communication Dans Un Congrès Année : 2011

Recombination coefficients of Cl atoms on Al2O3 walls determined by TALIF

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hal-02594744 , version 1 (15-05-2020)

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  • HAL Id : hal-02594744 , version 1

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Jean-Paul Booth, Nishant Sirse, Yasmina Azamoum, Mujahid Zaka-Ul-Islam, Pascal Chabert. Recombination coefficients of Cl atoms on Al2O3 walls determined by TALIF. Plasma Etch and Strip for Microelectronics (PESM), May 2011, Mechelen, Belgium. ⟨hal-02594744⟩
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