The role of translational and vibrational energy in processing plasmas: novel optical diagnostics of low-pressure Cl<SUB>2</SUB> and O<SUB>2</SUB> inductively-coupled plasmas - Archive ouverte HAL
Communication Dans Un Congrès Année : 2017

The role of translational and vibrational energy in processing plasmas: novel optical diagnostics of low-pressure Cl2 and O2 inductively-coupled plasmas

Jean-Paul Booth
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hal-02573371 , version 1 (14-05-2020)

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  • HAL Id : hal-02573371 , version 1

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Jean-Paul Booth. The role of translational and vibrational energy in processing plasmas: novel optical diagnostics of low-pressure Cl2 and O2 inductively-coupled plasmas. 1st Asia-Pacific Conference on Plasma Physics, Sep 2017, Chengdu, China. ⟨hal-02573371⟩
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