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Communication Dans Un Congrès Année : 2017

Modelling Inductively coupled plasmas in molecular gases : the role of gas heating and fundamental collision processes

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hal-02573370 , version 1 (14-05-2020)

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  • HAL Id : hal-02573370 , version 1

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Andrew Gibson. Modelling Inductively coupled plasmas in molecular gases : the role of gas heating and fundamental collision processes. International Workshop on Radio-Frequency Plasmas, May 2017, Presqu’ile de Giens, France. ⟨hal-02573370⟩
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