All you ever wanted to know about Fluorocarbon Plasmas but never dared to ask - Archive ouverte HAL
Communication Dans Un Congrès Année : 2011

All you ever wanted to know about Fluorocarbon Plasmas but never dared to ask

Jean-Paul Booth
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hal-02573302 , version 1 (14-05-2020)

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  • HAL Id : hal-02573302 , version 1

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Jean-Paul Booth. All you ever wanted to know about Fluorocarbon Plasmas but never dared to ask. POSMOL (International Symposium on Electron Molecule Collisions and Swarms), Jul 2011, Maynooth, Ireland. ⟨hal-02573302⟩
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