Microlens self-writing on vertical laser diodes by Near Infra-Red photo-polymerization

We report on the improvement of a fabrication method for micro-optics integration on vertical semiconductor laser diodes (VCSELs). Our approach is based on microlens self-writing by the laser beam itself thanks to self-guided Near-Infra-Red photopolymerization. Fabrication conditions have been optimized to control and take benefit of process sensitivity to oxygen quenching and to make possible the study of photo-chemical parameters influence on final tip geometry. The interest of this simple method for fabricating focused-beam VCSELs is finally discussed.

Mots clés

photo-polymerization laser writing micro-optics maskless fabrication optical probing

Domaines

Optique / photonique Micro et nanotechnologies/Microélectronique Matériaux Electronique

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MEE_Barat_2013.pdf (3.11 Mo)

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Véronique Bardinal : Connectez-vous pour contacter le contributeur

https://hal.science/hal-02569641

Soumis le : lundi 11 mai 2020-14:55:41

Dernière modification le : jeudi 11 avril 2024-13:08:15

Dates et versions

hal-02569641 , version 1 (11-05-2020)

Identifiants

HAL Id : hal-02569641 , version 1
DOI : 10.1016/j.mee.2013.03.155

Citer

David Barat, Véronique Bardinal, I. Dika, O. Soppera, Anna Rumyantseva, et al.. Microlens self-writing on vertical laser diodes by Near Infra-Red photo-polymerization. Microelectronic Engineering, 2013, 111, pp.204-209. ⟨10.1016/j.mee.2013.03.155⟩. ⟨hal-02569641⟩

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