<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-02541824</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-14T09:29:22+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Effect of heating treatment and mixture on optical properties of coating materials used in gravitational-wave detectors</title>
            <author role="crp">
              <persName>
                <forename type="first">Alex</forename>
                <surname>Amato</surname>
              </persName>
              <email type="md5">01f2764d8364d1172a5f40dabdc2d931</email>
              <email type="domain">lma.in2p3.fr</email>
              <idno type="idhal" notation="numeric">1067885</idno>
              <idno type="halauthorid" notation="string">227526-1067885</idno>
              <affiliation ref="#struct-1839"/>
              <affiliation ref="#struct-2"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Silvana</forename>
                <surname>Terreni</surname>
              </persName>
              <idno type="halauthorid">1632580-0</idno>
              <affiliation ref="#struct-302889"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Massimo</forename>
                <surname>Granata</surname>
              </persName>
              <idno type="halauthorid">652382-0</idno>
              <affiliation ref="#struct-1839"/>
              <affiliation ref="#struct-2"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Christophe</forename>
                <surname>Michel</surname>
              </persName>
              <idno type="idhal" notation="numeric">762960</idno>
              <idno type="halauthorid" notation="string">481012-762960</idno>
              <idno type="IDREF">https://www.idref.fr/02976999X</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-0606-725X</idno>
              <affiliation ref="#struct-1839"/>
              <affiliation ref="#struct-2"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Laurent</forename>
                <surname>Pinard</surname>
              </persName>
              <idno type="halauthorid">151384-0</idno>
              <affiliation ref="#struct-1839"/>
              <affiliation ref="#struct-2"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Gianluca</forename>
                <surname>Gemme</surname>
              </persName>
              <idno type="halauthorid">1267740-0</idno>
              <affiliation ref="#struct-25238"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Maurizio</forename>
                <surname>Canepa</surname>
              </persName>
              <idno type="halauthorid">1268222-0</idno>
              <affiliation ref="#struct-302889"/>
              <affiliation ref="#struct-25238"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Gianpietro</forename>
                <surname>Cagnoli</surname>
              </persName>
              <idno type="halauthorid">788422-0</idno>
              <affiliation ref="#struct-394721"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Armelle</forename>
                <surname>VIDAL</surname>
              </persName>
              <email type="md5">101b9afc274f2ab2d37ca7626243f538</email>
              <email type="domain">univ-lyon1.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2021-02-03 14:45:10</date>
              <date type="whenModified">2026-01-28 10:40:02</date>
              <date type="whenReleased">2021-02-12 08:33:44</date>
              <date type="whenProduced">2019-11</date>
              <date type="whenEndEmbargoed">2021-02-03</date>
              <ref type="file" target="https://hal.science/hal-02541824v1/document">
                <date notBefore="2021-02-03"/>
              </ref>
              <ref type="file" subtype="greenPublisher" n="1" target="https://hal.science/hal-02541824v1/file/JVB19-AR-ICSE2019-00296.pdf" id="file-3130288-2742852">
                <date notBefore="2021-02-03"/>
              </ref>
              <ref type="externalLink" target="https://iris.unige.it/bitstream/11567/979793/1/JVB19-AR-ICSE2019-00296.pdf"/>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="781428">
                <persName>
                  <forename>Armelle</forename>
                  <surname>VIDAL</surname>
                </persName>
                <email type="md5">101b9afc274f2ab2d37ca7626243f538</email>
                <email type="domain">univ-lyon1.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-02541824</idno>
            <idno type="halUri">https://hal.science/hal-02541824</idno>
            <idno type="halBibtex">amato:hal-02541824</idno>
            <idno type="halRefHtml">&lt;i&gt;Journal of Vacuum Science &amp; Technology B, Nanotechnology and Microelectronics&lt;/i&gt;, 2019, 37 (6), pp.062913. &lt;a target="_blank" href="https://dx.doi.org/10.1116/1.5122661"&gt;&amp;#x27E8;10.1116/1.5122661&amp;#x27E9;&lt;/a&gt;</idno>
            <idno type="halRef">Journal of Vacuum Science &amp; Technology B, Nanotechnology and Microelectronics, 2019, 37 (6), pp.062913. &amp;#x27E8;10.1116/1.5122661&amp;#x27E9;</idno>
            <availability status="restricted">
              <licence target="https://about.hal.science/hal-authorisation-v1/">HAL Authorization<ref corresp="#file-3130288-2742852"/></licence>
            </availability>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="IN2P3">Institut National de Physique Nucléaire et de Physique des Particules</idno>
            <idno type="stamp" n="LMA">Laboratoire des Matériaux Avancés</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="UNIV-LYON1">Université Claude Bernard - Lyon I</idno>
            <idno type="stamp" n="ILM" corresp="UNIV-LYON1">Institut Lumière Matière</idno>
            <idno type="stamp" n="IP2I" corresp="UNIV-LYON1">Institut de Physique des 2 Infinis de Lyon</idno>
            <idno type="stamp" n="UDL">UDL</idno>
            <idno type="stamp" n="UNIV-LYON">Université de Lyon</idno>
            <idno type="stamp" n="LMA_IP2I" corresp="LMA">Ondes Gravitationnelles</idno>
            <idno type="stamp" n="ILM-SOPRANO" corresp="ILM">Equipe SOPRANO</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Effect of heating treatment and mixture on optical properties of coating materials used in gravitational-wave detectors</title>
                <author role="crp">
                  <persName>
                    <forename type="first">Alex</forename>
                    <surname>Amato</surname>
                  </persName>
                  <email type="md5">01f2764d8364d1172a5f40dabdc2d931</email>
                  <email type="domain">lma.in2p3.fr</email>
                  <idno type="idhal" notation="numeric">1067885</idno>
                  <idno type="halauthorid" notation="string">227526-1067885</idno>
                  <affiliation ref="#struct-1839"/>
                  <affiliation ref="#struct-2"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Silvana</forename>
                    <surname>Terreni</surname>
                  </persName>
                  <idno type="halauthorid">1632580-0</idno>
                  <affiliation ref="#struct-302889"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Massimo</forename>
                    <surname>Granata</surname>
                  </persName>
                  <idno type="halauthorid">652382-0</idno>
                  <affiliation ref="#struct-1839"/>
                  <affiliation ref="#struct-2"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Christophe</forename>
                    <surname>Michel</surname>
                  </persName>
                  <idno type="idhal" notation="numeric">762960</idno>
                  <idno type="halauthorid" notation="string">481012-762960</idno>
                  <idno type="IDREF">https://www.idref.fr/02976999X</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-0606-725X</idno>
                  <affiliation ref="#struct-1839"/>
                  <affiliation ref="#struct-2"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Laurent</forename>
                    <surname>Pinard</surname>
                  </persName>
                  <idno type="halauthorid">151384-0</idno>
                  <affiliation ref="#struct-1839"/>
                  <affiliation ref="#struct-2"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Gianluca</forename>
                    <surname>Gemme</surname>
                  </persName>
                  <idno type="halauthorid">1267740-0</idno>
                  <affiliation ref="#struct-25238"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Maurizio</forename>
                    <surname>Canepa</surname>
                  </persName>
                  <idno type="halauthorid">1268222-0</idno>
                  <affiliation ref="#struct-302889"/>
                  <affiliation ref="#struct-25238"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Gianpietro</forename>
                    <surname>Cagnoli</surname>
                  </persName>
                  <idno type="halauthorid">788422-0</idno>
                  <affiliation ref="#struct-394721"/>
                </author>
              </analytic>
              <monogr>
                <idno type="halJournalId" status="VALID">112565</idno>
                <idno type="issn">2166-2746</idno>
                <idno type="eissn">2166-2754</idno>
                <title level="j">Journal of Vacuum Science &amp; Technology B, Nanotechnology and Microelectronics</title>
                <imprint>
                  <publisher>AVS through the American Institute of Physics</publisher>
                  <biblScope unit="volume">37</biblScope>
                  <biblScope unit="issue">6</biblScope>
                  <biblScope unit="pp">062913</biblScope>
                  <date type="datePub">2019-11</date>
                  <date type="dateEpub">2019-10-17</date>
                </imprint>
              </monogr>
              <idno type="doi">10.1116/1.5122661</idno>
              <idno type="inspire">1791034</idno>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <keywords scheme="author">
                <term xml:lang="en">Materials heat treatment</term>
                <term xml:lang="en">Optical properties</term>
                <term xml:lang="en">Optical metrology</term>
                <term xml:lang="en">Band gap</term>
                <term xml:lang="en">Optical absorption</term>
                <term xml:lang="en">Gravitational wave astronomy</term>
              </keywords>
              <classCode scheme="halDomain" n="spi">Engineering Sciences [physics]</classCode>
              <classCode scheme="halDomain" n="chim">Chemical Sciences</classCode>
              <classCode scheme="halDomain" n="phys">Physics [physics]</classCode>
              <classCode scheme="halTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halOldTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halTreeTypology" n="ART">Journal articles</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>The interferometer mirrors of gravitational-wave detectors (GWDs) are Bragg reflectors made of alternate amorphous silica (SiO$_2$) and titania-doped tantala (TiO$_2$:Ta$_2$O$_5$) layers as low- and high-refractive index materials, respectively. A thermal treatment is usually performed to reduce both mechanical losses and near-infrared (NIR) optical absorptions of the coatings. The authors present a spectroscopic ellipsometry (SE) investigation of the effect of annealing and Ti:Ta mixing on Ta$_2$O$_5$ coatings deposited under conditions similar to those adopted for building up mirrors of GWDs. The broadband analysis covers both the NIR and the fundamental absorption threshold region. The data show an evident annealing-induced reduction of the fundamental optical absorption broadening. Modeling the data through the Cody-Lorentz formula confirms that NIR absorptions are below the SE sensitivity and shows a notable annealing-induced reduction of so-called Urbach tails. Titania-doping of tantala slightly reduces the Urbach energy. After the heating treatment, the resulting Urbach energy of the doped material is lower than that of annealed pure tantala. The observed reduction of Urbach tails is important because it parallels the reduction of the so-called internal friction observed in mechanical measurements so that SE emerges as a convenient tool for an agile diagnostic of both the optical and the mechanical quality of amorphous oxide coatings.</p>
            </abstract>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="laboratory" xml:id="struct-1839" status="VALID">
          <idno type="IdRef">24366348X</idno>
          <idno type="RNSR">202324421Z</idno>
          <idno type="ROR">https://ror.org/00w1qvp54</idno>
          <orgName>Laboratoire des matériaux avancés</orgName>
          <orgName type="acronym">LMA</orgName>
          <date type="start">2004-01-01</date>
          <desc>
            <address>
              <addrLine>Bâtiment 213 VIRGO 22 7 avenue Pierre de Coubertin 69622 VILLEURBANNE CEDEX</addrLine>
              <country key="FR"/>
            </address>
          </desc>
          <listRelation>
            <relation active="#struct-194495" type="direct"/>
            <relation active="#struct-301088" type="indirect"/>
            <relation active="#struct-300046" type="direct"/>
            <relation name="UAR2034 / USR3264 / UPS2713" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-2" status="OLD">
          <idno type="IdRef">083864520</idno>
          <idno type="RNSR">199512096Z</idno>
          <orgName>Institut de Physique Nucléaire de Lyon</orgName>
          <orgName type="acronym">IPNL</orgName>
          <date type="start">1971-01-01</date>
          <date type="end">2019-06-30</date>
          <desc>
            <address>
              <addrLine>Campus LyonTech-la DouaBâtiment Paul DIRAC4 Rue Enrico Fermi69622 Villeurbanne Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.ipnl.in2p3.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-194495" type="direct"/>
            <relation active="#struct-301088" type="indirect"/>
            <relation active="#struct-300046" type="direct"/>
            <relation name="UMR5822 / UMR6422" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-302889" status="VALID">
          <idno type="IdRef">032054262</idno>
          <idno type="ROR">https://ror.org/0107c5v14</idno>
          <idno type="Wikidata">032054262</idno>
          <orgName>Università degli studi di Genova = University of Genoa = Université de Gênes</orgName>
          <orgName type="acronym">UniGe</orgName>
          <desc>
            <address>
              <addrLine>Via Balbi, 5 - 16126 Genova</addrLine>
              <country key="IT"/>
            </address>
            <ref type="url">https://unige.it/it</ref>
          </desc>
        </org>
        <org type="laboratory" xml:id="struct-25238" status="VALID">
          <idno type="ROR">https://ror.org/02v89pq06</idno>
          <idno type="Wikidata">Q30265286</idno>
          <orgName>Istituto Nazionale di Fisica Nucleare, Sezione di Genova = National Institute for Nuclear Physics, Genoa [Gênes]</orgName>
          <orgName type="acronym">INFN, Sezione di Genova</orgName>
          <desc>
            <address>
              <addrLine>Via Dodecaneso 33 16146 Genova</addrLine>
              <country key="IT"/>
            </address>
            <ref type="url">http://www.ge.infn.it/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-300039" type="direct"/>
          </listRelation>
        </org>
        <org type="researchteam" xml:id="struct-394721" status="VALID">
          <orgName>iLM - Spectroscopies optiques des matériaux verres, amorphes et à nanoparticules</orgName>
          <orgName type="acronym">iLM - SOPRANO</orgName>
          <date type="start">2013-01-01</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://ilm.univ-lyon1.fr/index.php?option=com_content&amp;view=article&amp;id=70&amp;catid=39</ref>
          </desc>
          <listRelation>
            <relation active="#struct-224716" type="direct"/>
            <relation active="#struct-194495" type="indirect"/>
            <relation active="#struct-301088" type="indirect"/>
            <relation name="UMR5306" active="#struct-441569" type="indirect"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-194495" status="VALID">
          <idno type="IdRef">026402823</idno>
          <idno type="ISNI">0000000121686185</idno>
          <idno type="ROR">https://ror.org/029brtt94</idno>
          <orgName>Université Claude Bernard Lyon 1</orgName>
          <orgName type="acronym">UCBL</orgName>
          <desc>
            <address>
              <addrLine>43, boulevard du 11 novembre 1918, 69622 Villeurbanne cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-lyon1.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-301088" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-301088" status="VALID">
          <idno type="ROR">https://ror.org/01rk35k63</idno>
          <orgName>Université de Lyon</orgName>
          <desc>
            <address>
              <addrLine>92 rue Pasteur - CS 30122, 69361 Lyon Cedex 07</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.universite-lyon.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-300046" status="VALID">
          <idno type="IdRef">028227875</idno>
          <idno type="ISNI">0000000106643574</idno>
          <idno type="ROR">https://ror.org/03fd77x13</idno>
          <orgName>Institut National de Physique Nucléaire et de Physique des Particules du CNRS</orgName>
          <orgName type="acronym">IN2P3</orgName>
          <desc>
            <address>
              <addrLine>CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE3 rue Michel-Ange75794 PARIS CEDEX 16 - France</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://in2p3.cnrs.fr</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-300039" status="VALID">
          <idno type="IdRef">030216397</idno>
          <idno type="ROR">https://ror.org/005ta0471</idno>
          <idno type="Wikidata">Q1674876</idno>
          <orgName>Istituto Nazionale di Fisica Nucleare = National Institute for Nuclear Physics [Rome]</orgName>
          <orgName type="acronym">INFN</orgName>
          <date type="start">1951-01-01</date>
          <desc>
            <address>
              <addrLine>40 Via Enrico Fermi, 00044 Frascati, Italie</addrLine>
              <country key="IT"/>
            </address>
            <ref type="url">https://www.infn.it/</ref>
          </desc>
        </org>
        <org type="laboratory" xml:id="struct-224716" status="VALID">
          <idno type="IdRef">17806890X</idno>
          <idno type="ISNI">0000000403844911</idno>
          <idno type="RNSR">201320570G</idno>
          <idno type="ROR">0323bey33</idno>
          <orgName>Institut Lumière Matière [Villeurbanne]</orgName>
          <orgName type="acronym">ILM</orgName>
          <date type="start">2013-01-01</date>
          <desc>
            <address>
              <addrLine>UMR5306 CNRS Université Claude Bernard Lyon 1 Domaine Scientifique de La Doua Bâtiment Kastler, 10 rue Ada Byron 69622 Villeurbanne CEDEX, Franc</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://ilm.univ-lyon1.fr/index.php</ref>
          </desc>
          <listRelation>
            <relation active="#struct-194495" type="direct"/>
            <relation active="#struct-301088" type="indirect"/>
            <relation name="UMR5306" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>