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Communication Dans Un Congrès Année : 2019

Steps toward integration of zeolite-based thermal mass gas detectors to form electronic nose

Résumé

In this paper, we show the integration steps we have undertaken for the integration of a recently proposed new principle for gas detection. Benefits of integration and co-integration of the miniaturized detectors with CMOS electronics will be the realization of arrays of selective detectors resulting in a new kind of electronic nose.
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Dates et versions

hal-02531336 , version 1 (03-04-2020)

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Citer

Matthieu Denoual, Mathieu Pouliquen, Corentin Jorel, Didier Robbes, Julien Grand, et al.. Steps toward integration of zeolite-based thermal mass gas detectors to form electronic nose. 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), May 2019, Paris, France. pp.1-4, ⟨10.1109/DTIP.2019.8752802⟩. ⟨hal-02531336⟩
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