High Temperature Thermal Conductivity of Amorphous Al 2 O 3 Thin Films Grown by Low Temperature ALD - Archive ouverte HAL
Article Dans Une Revue Advanced Engineering Materials Année : 2013

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hal-02441613 , version 1 (15-01-2020)

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Andrea Cappella, Jean-Luc Battaglia, Vincent Schick, Andrzej Kusiak, Alessio Lamperti, et al.. High Temperature Thermal Conductivity of Amorphous Al 2 O 3 Thin Films Grown by Low Temperature ALD. Advanced Engineering Materials, 2013, 15 (11), pp.1046-1050. ⟨10.1002/adem.201300132⟩. ⟨hal-02441613⟩
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