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Communication Dans Un Congrès Année : 2005
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hal-02440267 , version 1 (15-01-2020)

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A. Phommahaxay, Gaelle Bazin Lissorgues, Tarik Bourouina, P. Nicole. Single mask fabrication process of vacuum microelectronics components and preliminary characterization results. Technical Digest of the 18th International Vacuum Nanoelectronics Conference, 2005, Oxford, United Kingdom. pp.368-369, ⟨10.1109/IVNC.2005.1619639⟩. ⟨hal-02440267⟩
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