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Communication Dans Un Congrès Année : 2012

Optical actuation and detection of MEMS resonators: Behavioral modeling and phase noise simulations

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hal-02435458 , version 1 (10-01-2020)

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Guillaume Papin, Raphaël Levy, Alain Bosseboeuf, Filippo Fabbri, Fabien Parrain, et al.. Optical actuation and detection of MEMS resonators: Behavioral modeling and phase noise simulations. 2012 IEEE International Frequency Control Symposium (FCS), May 2012, Baltimore, United States. pp.1-5, ⟨10.1109/FCS.2012.6243656⟩. ⟨hal-02435458⟩
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