Investigation of the effect of aluminum doped zinc oxide (ZnOAl) thin films by spray pyrolysis
Résumé
In this study, aluminum doped zinc oxide thin films were deposited on ordinary glass substrates at the temperature of 425°C by spray pyrolysis technique for various doping concentrations of aluminum ranging from 1 to 5 at.%. The effect of dopant concentration on structural, morphological and optical properties of ZnOAl thin films was studied. Optical band gap of the films increased with doping percentage and started to decrease from 2 at.% of dopant. The average transmittance for 2at.% ZnOAl film is significantly increased over 90% in the visible region at 450 nm which is crucial for optoelectronic applications. © 2016 Taylor and Francis Group, LLC.
Mots clés
- Oxide films
- Optoelectronic applications
- Glass substrates
- Semiconductor doping
- Spray pyrolysis
- Thin films
- Substrates
- Zinc
- ZnOAl thin films
- Aluminum
- Doping (additives)
- Zinc oxide
- Pyrolysis
- Doping concentration
- Effect of dopants
- Aluminum-doped zinc oxide thin films
- Energy gap
- Optical properties
- Aluminum coatings
- Optical films
- Spray-pyrolysis techniques
- Aluminum doped zinc oxides (ZnOAl)