%0 Journal Article
%T Thermal oxidation of oxynitride films as a strategy to achieve (Sr2Ta2O7)100-x(La2Ti2O7)x based oxide perovskite films with x = 1.65
%+ Institut d'Électronique et des Technologies du numéRique (IETR)
%+ Institut des Sciences Chimiques de Rennes (ISCR)
%+ Institut de Physique de Rennes (IPR)
%A Le Gendre, L.
%A Le Paven, C.
%A Haydoura, M.
%A Benzerga, R.
%A Marlec, Florent
%A Sharaiha, A.
%A Cheviré, François
%A Tessier, Franck
%A Moréac, A.
%Z Ministère de l'Education Nationale, de l'Enseignement Superieur et de la Recherche
%Z European Union through the European Regional Development Fund
%Z Brittany Région and Côtes d’Armor Département
%Z Conseil Départemental des Côtes d’Armor
%Z Saint Brieuc Armor Agglomération
%Z Syndicat de Gestion du Pole Universitaire de Saint Brieuc
%< avec comité de lecture
%@ 0955-2219
%J Journal of the European Ceramic Society
%I Elsevier
%V 40
%N 16
%P 6293-6300
%8 2020-12
%D 2020
%R 10.1016/j.jeurceramsoc.2019.12.023
%Z Chemical Sciences
%Z Chemical Sciences/Material chemistry
%Z Physics [physics]Journal articles
%X This study concerns STLTO compounds of the ferroelectric (Sr 2 Ta 2 O 7) 100-x (La 2 Ti 2 O 7) x solid solution. The purpose is to produce the STLTO composition x = 1.65 as thin films by thermal oxidation of the corresponding oxynitride composition. Indeed, the combination of an STLTO oxide target with a dioxygen-rich reactive atmosphere during the sputtering deposition leads to Sr-deficient oxide thin films, shifting composition and structure from the perovskite to the tetragonal tungsten bronze type. An alternative synthesis pathway is to first deposit, under nitrogen-rich atmosphere, stoichiometric oxynitride films and produce, by thermal annealing under air, the stoichiometric oxide. For low oxidation temperatures ([550-600°C]), samples remain intact and display an oxide character but still contain a significant amount of nitrogen; they could be described as intermediate phases containing nitrogen-nitrogen pairs as demonstrated by Raman. Dielectric characteristics of these original film materials are of interest with a tunability value of 26 % at 30 kV/cm (10 kHz).
%G English
%2 https://hal-univ-rennes1.archives-ouvertes.fr/hal-02421162/document
%2 https://hal-univ-rennes1.archives-ouvertes.fr/hal-02421162/file/LePaven2020x.pdf
%L hal-02421162
%U https://hal-univ-rennes1.archives-ouvertes.fr/hal-02421162
%~ UNIV-NANTES
%~ UNIV-RENNES1
%~ CNRS
%~ INSA-RENNES
%~ ENSC-RENNES
%~ IETR
%~ OSUR
%~ ISCR
%~ SCR_VC
%~ IETR_MF
%~ IPR
%~ IPR-MN
%~ ZZ-IPR-MN
%~ CENTRALESUPELEC
%~ UR1-SPM
%~ INC-CNRS
%~ UR1-UFR-SPM
%~ UR1-HAL
%~ UR1-MATH-STIC
%~ UR1-SDLM
%~ UR1-UFR-ISTIC
%~ IETR-CUTE
%~ IETR-FUNMAT
%~ IVER
%~ IETR-ADH
%~ TEST-UR-CSS
%~ UNIV-RENNES
%~ INSA-GROUPE
%~ TEST-HALCNRS
%~ UR1-MATH-NUM
%~ UR1-MMS
%~ IETR-STAR
%~ NANTES-UNIVERSITE
%~ UNIV-NANTES-AV2022