%0 Journal Article %T Thermal oxidation of oxynitride films as a strategy to achieve (Sr2Ta2O7)100-x(La2Ti2O7)x based oxide perovskite films with x = 1.65 %+ Institut d'Électronique et des Technologies du numéRique (IETR) %+ Institut des Sciences Chimiques de Rennes (ISCR) %+ Institut de Physique de Rennes (IPR) %A Le Gendre, L. %A Le Paven, C. %A Haydoura, M. %A Benzerga, R. %A Marlec, Florent %A Sharaiha, A. %A Cheviré, François %A Tessier, Franck %A Moréac, A. %Z Ministère de l'Education Nationale, de l'Enseignement Superieur et de la Recherche %Z European Union through the European Regional Development Fund %Z Brittany Région and Côtes d’Armor Département %Z Conseil Départemental des Côtes d’Armor %Z Saint Brieuc Armor Agglomération %Z Syndicat de Gestion du Pole Universitaire de Saint Brieuc %< avec comité de lecture %@ 0955-2219 %J Journal of the European Ceramic Society %I Elsevier %V 40 %N 16 %P 6293-6300 %8 2020-12 %D 2020 %R 10.1016/j.jeurceramsoc.2019.12.023 %Z Chemical Sciences %Z Chemical Sciences/Material chemistry %Z Physics [physics]Journal articles %X This study concerns STLTO compounds of the ferroelectric (Sr 2 Ta 2 O 7) 100-x (La 2 Ti 2 O 7) x solid solution. The purpose is to produce the STLTO composition x = 1.65 as thin films by thermal oxidation of the corresponding oxynitride composition. Indeed, the combination of an STLTO oxide target with a dioxygen-rich reactive atmosphere during the sputtering deposition leads to Sr-deficient oxide thin films, shifting composition and structure from the perovskite to the tetragonal tungsten bronze type. An alternative synthesis pathway is to first deposit, under nitrogen-rich atmosphere, stoichiometric oxynitride films and produce, by thermal annealing under air, the stoichiometric oxide. For low oxidation temperatures ([550-600°C]), samples remain intact and display an oxide character but still contain a significant amount of nitrogen; they could be described as intermediate phases containing nitrogen-nitrogen pairs as demonstrated by Raman. Dielectric characteristics of these original film materials are of interest with a tunability value of 26 % at 30 kV/cm (10 kHz). %G English %2 https://hal-univ-rennes1.archives-ouvertes.fr/hal-02421162/document %2 https://hal-univ-rennes1.archives-ouvertes.fr/hal-02421162/file/LePaven2020x.pdf %L hal-02421162 %U https://hal-univ-rennes1.archives-ouvertes.fr/hal-02421162 %~ UNIV-NANTES %~ UNIV-RENNES1 %~ CNRS %~ INSA-RENNES %~ ENSC-RENNES %~ IETR %~ OSUR %~ ISCR %~ SCR_VC %~ IETR_MF %~ IPR %~ IPR-MN %~ ZZ-IPR-MN %~ CENTRALESUPELEC %~ UR1-SPM %~ INC-CNRS %~ UR1-UFR-SPM %~ UR1-HAL %~ UR1-MATH-STIC %~ UR1-SDLM %~ UR1-UFR-ISTIC %~ IETR-CUTE %~ IETR-FUNMAT %~ IVER %~ IETR-ADH %~ TEST-UR-CSS %~ UNIV-RENNES %~ INSA-GROUPE %~ TEST-HALCNRS %~ UR1-MATH-NUM %~ UR1-MMS %~ IETR-STAR %~ NANTES-UNIVERSITE %~ UNIV-NANTES-AV2022