<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-02414264</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-14T07:23:20+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Revisited Thermal and Plasma Enhanced Atomic Layer Deposition combined with Chemical Vapor Deposition processes of metal nitrides: challenges and opportunities</title>
            <author role="aut">
              <persName>
                <forename type="first">Elisabeth</forename>
                <surname>Blanquet</surname>
              </persName>
              <email type="md5">acc75f86eadaf3533e3db2fae8d7cb5b</email>
              <email type="domain">simap.grenoble-inp.fr</email>
              <idno type="idhal" notation="string">elisabeth-blanquet</idno>
              <idno type="idhal" notation="numeric">739157</idno>
              <idno type="halauthorid" notation="string">182778-739157</idno>
              <idno type="IDREF">https://www.idref.fr/135652669</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-6467-9110</idno>
              <affiliation ref="#struct-1041828"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Arnaud</forename>
                <surname>Mantoux</surname>
              </persName>
              <email type="md5">d48c548c11da2c95fb8589587852303e</email>
              <email type="domain">univ-grenoble-alpes.fr</email>
              <idno type="idhal" notation="string">arnaud-mantoux</idno>
              <idno type="idhal" notation="numeric">20624</idno>
              <idno type="halauthorid" notation="string">4835-20624</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-9043-7465</idno>
              <affiliation ref="#struct-1041828"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Frédéric</forename>
                <surname>Mercier</surname>
              </persName>
              <email type="md5">479bda772470fc112aa326a7a2646756</email>
              <email type="domain">grenoble-inp.fr</email>
              <idno type="idhal" notation="string">mercierf-simap</idno>
              <idno type="idhal" notation="numeric">739208</idno>
              <idno type="halauthorid" notation="string">24757-739208</idno>
              <affiliation ref="#struct-1041828"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Raphael</forename>
                <surname>Boichot</surname>
              </persName>
              <email type="md5">deed8ab74f73697d6afc9cccfbad1d1d</email>
              <email type="domain">hotmail.fr</email>
              <idno type="idhal" notation="numeric">847547</idno>
              <idno type="halauthorid" notation="string">1105855-847547</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-7962-3881</idno>
              <idno type="IDREF">https://www.idref.fr/150309872</idno>
              <affiliation ref="#struct-1041828"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Ioana</forename>
                <surname>Nuta</surname>
              </persName>
              <email type="md5">4175c099c3099ab684ffaef6f9517c69</email>
              <email type="domain">grenoble-inp.fr</email>
              <idno type="idhal" notation="string">ioana-nuta</idno>
              <idno type="idhal" notation="numeric">751359</idno>
              <idno type="halauthorid" notation="string">54366-751359</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-1255-2289</idno>
              <affiliation ref="#struct-1041828"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">J.J.</forename>
                <surname>Blandin</surname>
              </persName>
              <email type="md5">d48f0a93fc0068fd9bee5ca9dee7bc2c</email>
              <email type="domain">simap.grenoble-inp.fr</email>
              <idno type="idhal" notation="numeric">857930</idno>
              <idno type="halauthorid" notation="string">202585-857930</idno>
              <affiliation ref="#struct-1041828"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Rémy</forename>
                <surname>Dendievel</surname>
              </persName>
              <email type="md5">36bb40cfb133bf79cb7763b7e0d7cc55</email>
              <email type="domain">phelma.grenoble-inp.fr</email>
              <idno type="idhal" notation="numeric">973430</idno>
              <idno type="halauthorid" notation="string">557038-973430</idno>
              <affiliation ref="#struct-1041828"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Marc</forename>
                <surname>Fivel</surname>
              </persName>
              <email type="md5">727838967ccf7b92848b778bf0fd5384</email>
              <email type="domain">simap.grenoble-inp.fr</email>
              <idno type="idhal" notation="string">marc-fivel</idno>
              <idno type="idhal" notation="numeric">17514</idno>
              <idno type="halauthorid" notation="string">221578-17514</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-0393-2191</idno>
              <idno type="IDREF">https://www.idref.fr/084685670</idno>
              <affiliation ref="#struct-1041828"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Carmen</forename>
                <surname>Jiménez</surname>
              </persName>
              <email type="md5">dfc3c5d76dfa9dd73b259a9dc7021ad1</email>
              <email type="domain">grenoble-inp.fr</email>
              <idno type="idhal" notation="string">carmen-jimenez</idno>
              <idno type="idhal" notation="numeric">169812</idno>
              <idno type="halauthorid" notation="string">6404-169812</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-9601-1825</idno>
              <idno type="IDREF">https://www.idref.fr/193257114</idno>
              <affiliation ref="#struct-761"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">David</forename>
                <surname>Munoz-Rojas</surname>
              </persName>
              <email type="md5">0d6fce5aa0da902206a64106d7fd3cb8</email>
              <email type="domain">grenoble-inp.fr</email>
              <idno type="idhal" notation="string">david-munoz-rojas</idno>
              <idno type="idhal" notation="numeric">738331</idno>
              <idno type="halauthorid" notation="string">5060-738331</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/C-1227-2010</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-1234-0814</idno>
              <idno type="GOOGLE SCHOLAR">https://scholar.google.com/citations?user=_BvaY5MAAAAJ&amp;hl=en</idno>
              <idno type="IDREF">https://www.idref.fr/192780107</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/http://www.researcherid.com/rid/C-1227-2010</idno>
              <affiliation ref="#struct-761"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Daniel</forename>
                <surname>Bellet</surname>
              </persName>
              <email type="md5">1723075c7a1bda37548f407771b3f0e7</email>
              <email type="domain">grenoble-inp.fr</email>
              <idno type="idhal" notation="string">daniel-bellet-grenoble</idno>
              <idno type="idhal" notation="numeric">1120923</idno>
              <idno type="halauthorid" notation="string">497765-1120923</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-9929-3696</idno>
              <idno type="IDREF">https://www.idref.fr/086029266</idno>
              <affiliation ref="#struct-761"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Elisabeth</forename>
                <surname>BLANQUET</surname>
              </persName>
              <email type="md5">acc75f86eadaf3533e3db2fae8d7cb5b</email>
              <email type="domain">simap.grenoble-inp.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2022-07-22 16:58:00</date>
              <date type="whenModified">2025-09-27 18:47:12</date>
              <date type="whenReleased">2022-07-26 14:28:26</date>
              <date type="whenProduced">2019-12-01</date>
              <ref type="annex" n="0" target="https://hal.science/hal-02414264v1/file/MRS%20Boston%202019vf-EBlanquet%20%281%29.pdf" id="file-3736742-3265055">
                <date notBefore="2022-07-22"/>
              </ref>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="576869">
                <persName>
                  <forename>Elisabeth</forename>
                  <surname>BLANQUET</surname>
                </persName>
                <email type="md5">acc75f86eadaf3533e3db2fae8d7cb5b</email>
                <email type="domain">simap.grenoble-inp.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-02414264</idno>
            <idno type="halUri">https://hal.science/hal-02414264</idno>
            <idno type="halBibtex">blanquet:hal-02414264</idno>
            <idno type="halRefHtml">&lt;i&gt;MRS Fall Meeting, Symposium Advanced Atomic Layer Deposition and Chemical Vapor Deposition Techniques and Applications&lt;/i&gt;, Dec 2019, Boston, United States</idno>
            <idno type="halRef">MRS Fall Meeting, Symposium Advanced Atomic Layer Deposition and Chemical Vapor Deposition Techniques and Applications, Dec 2019, Boston, United States</idno>
            <availability status="restricted">
              <licence target="https://about.hal.science/hal-authorisation-v1/">HAL Authorization<ref corresp="#file-3736742-3265055"/></licence>
            </availability>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="UGA">HAL Grenoble Alpes</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="INPG">Institut polytechnique de Grenoble</idno>
            <idno type="stamp" n="SIMAP">Science et Ingénierie des Matériaux et Procédés</idno>
            <idno type="stamp" n="LMGP" corresp="FMNT">LMGP - Laboratoire des matériaux et du génie physique</idno>
            <idno type="stamp" n="INC-CNRS">Institut de Chimie du CNRS</idno>
            <idno type="stamp" n="TEST-HALCNRS">Collection test HAL CNRS</idno>
            <idno type="stamp" n="UGA-COMUE">Université Grenoble Alpes [2016-2019]</idno>
            <idno type="stamp" n="TEST2-HALCNRS">TEST2-HALCNRS</idno>
            <idno type="stamp" n="TEST-UGA">TEST-UGA</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="invited" n="0">No</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
            <note type="proceedings" n="0">No</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Revisited Thermal and Plasma Enhanced Atomic Layer Deposition combined with Chemical Vapor Deposition processes of metal nitrides: challenges and opportunities</title>
                <author role="aut">
                  <persName>
                    <forename type="first">Elisabeth</forename>
                    <surname>Blanquet</surname>
                  </persName>
                  <email type="md5">acc75f86eadaf3533e3db2fae8d7cb5b</email>
                  <email type="domain">simap.grenoble-inp.fr</email>
                  <idno type="idhal" notation="string">elisabeth-blanquet</idno>
                  <idno type="idhal" notation="numeric">739157</idno>
                  <idno type="halauthorid" notation="string">182778-739157</idno>
                  <idno type="IDREF">https://www.idref.fr/135652669</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-6467-9110</idno>
                  <affiliation ref="#struct-1041828"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Arnaud</forename>
                    <surname>Mantoux</surname>
                  </persName>
                  <email type="md5">d48c548c11da2c95fb8589587852303e</email>
                  <email type="domain">univ-grenoble-alpes.fr</email>
                  <idno type="idhal" notation="string">arnaud-mantoux</idno>
                  <idno type="idhal" notation="numeric">20624</idno>
                  <idno type="halauthorid" notation="string">4835-20624</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-9043-7465</idno>
                  <affiliation ref="#struct-1041828"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Frédéric</forename>
                    <surname>Mercier</surname>
                  </persName>
                  <email type="md5">479bda772470fc112aa326a7a2646756</email>
                  <email type="domain">grenoble-inp.fr</email>
                  <idno type="idhal" notation="string">mercierf-simap</idno>
                  <idno type="idhal" notation="numeric">739208</idno>
                  <idno type="halauthorid" notation="string">24757-739208</idno>
                  <affiliation ref="#struct-1041828"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Raphael</forename>
                    <surname>Boichot</surname>
                  </persName>
                  <email type="md5">deed8ab74f73697d6afc9cccfbad1d1d</email>
                  <email type="domain">hotmail.fr</email>
                  <idno type="idhal" notation="numeric">847547</idno>
                  <idno type="halauthorid" notation="string">1105855-847547</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-7962-3881</idno>
                  <idno type="IDREF">https://www.idref.fr/150309872</idno>
                  <affiliation ref="#struct-1041828"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Ioana</forename>
                    <surname>Nuta</surname>
                  </persName>
                  <email type="md5">4175c099c3099ab684ffaef6f9517c69</email>
                  <email type="domain">grenoble-inp.fr</email>
                  <idno type="idhal" notation="string">ioana-nuta</idno>
                  <idno type="idhal" notation="numeric">751359</idno>
                  <idno type="halauthorid" notation="string">54366-751359</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-1255-2289</idno>
                  <affiliation ref="#struct-1041828"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">J.J.</forename>
                    <surname>Blandin</surname>
                  </persName>
                  <email type="md5">d48f0a93fc0068fd9bee5ca9dee7bc2c</email>
                  <email type="domain">simap.grenoble-inp.fr</email>
                  <idno type="idhal" notation="numeric">857930</idno>
                  <idno type="halauthorid" notation="string">202585-857930</idno>
                  <affiliation ref="#struct-1041828"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Rémy</forename>
                    <surname>Dendievel</surname>
                  </persName>
                  <email type="md5">36bb40cfb133bf79cb7763b7e0d7cc55</email>
                  <email type="domain">phelma.grenoble-inp.fr</email>
                  <idno type="idhal" notation="numeric">973430</idno>
                  <idno type="halauthorid" notation="string">557038-973430</idno>
                  <affiliation ref="#struct-1041828"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Marc</forename>
                    <surname>Fivel</surname>
                  </persName>
                  <email type="md5">727838967ccf7b92848b778bf0fd5384</email>
                  <email type="domain">simap.grenoble-inp.fr</email>
                  <idno type="idhal" notation="string">marc-fivel</idno>
                  <idno type="idhal" notation="numeric">17514</idno>
                  <idno type="halauthorid" notation="string">221578-17514</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-0393-2191</idno>
                  <idno type="IDREF">https://www.idref.fr/084685670</idno>
                  <affiliation ref="#struct-1041828"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Carmen</forename>
                    <surname>Jiménez</surname>
                  </persName>
                  <email type="md5">dfc3c5d76dfa9dd73b259a9dc7021ad1</email>
                  <email type="domain">grenoble-inp.fr</email>
                  <idno type="idhal" notation="string">carmen-jimenez</idno>
                  <idno type="idhal" notation="numeric">169812</idno>
                  <idno type="halauthorid" notation="string">6404-169812</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-9601-1825</idno>
                  <idno type="IDREF">https://www.idref.fr/193257114</idno>
                  <affiliation ref="#struct-761"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">David</forename>
                    <surname>Munoz-Rojas</surname>
                  </persName>
                  <email type="md5">0d6fce5aa0da902206a64106d7fd3cb8</email>
                  <email type="domain">grenoble-inp.fr</email>
                  <idno type="idhal" notation="string">david-munoz-rojas</idno>
                  <idno type="idhal" notation="numeric">738331</idno>
                  <idno type="halauthorid" notation="string">5060-738331</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/C-1227-2010</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-1234-0814</idno>
                  <idno type="GOOGLE SCHOLAR">https://scholar.google.com/citations?user=_BvaY5MAAAAJ&amp;hl=en</idno>
                  <idno type="IDREF">https://www.idref.fr/192780107</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/http://www.researcherid.com/rid/C-1227-2010</idno>
                  <affiliation ref="#struct-761"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Daniel</forename>
                    <surname>Bellet</surname>
                  </persName>
                  <email type="md5">1723075c7a1bda37548f407771b3f0e7</email>
                  <email type="domain">grenoble-inp.fr</email>
                  <idno type="idhal" notation="string">daniel-bellet-grenoble</idno>
                  <idno type="idhal" notation="numeric">1120923</idno>
                  <idno type="halauthorid" notation="string">497765-1120923</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-9929-3696</idno>
                  <idno type="IDREF">https://www.idref.fr/086029266</idno>
                  <affiliation ref="#struct-761"/>
                </author>
              </analytic>
              <monogr>
                <meeting>
                  <title>MRS Fall Meeting, Symposium Advanced Atomic Layer Deposition and Chemical Vapor Deposition Techniques and Applications</title>
                  <date type="start">2019-12-01</date>
                  <date type="end">2019-12-07</date>
                  <settlement>Boston</settlement>
                  <country key="US">United States</country>
                </meeting>
                <imprint/>
              </monogr>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <classCode scheme="halDomain" n="chim.mate">Chemical Sciences/Material chemistry</classCode>
              <classCode scheme="halTypology" n="COMM">Conference papers</classCode>
              <classCode scheme="halOldTypology" n="COMM">Conference papers</classCode>
              <classCode scheme="halTreeTypology" n="COMM">Conference papers</classCode>
            </textClass>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="laboratory" xml:id="struct-1041828" status="OLD">
          <idno type="IdRef">184752396</idno>
          <idno type="ISNI">0000000121701576</idno>
          <idno type="RNSR">200711929R</idno>
          <idno type="ROR">https://ror.org/00m7zca23</idno>
          <orgName>Science et Ingénierie des Matériaux et Procédés</orgName>
          <orgName type="acronym">SIMaP</orgName>
          <date type="start">2016-01-01</date>
          <date type="end">2019-12-31</date>
          <desc>
            <address>
              <addrLine>1130 rue de la Piscine, BP 75 38402 Saint Martin D'Hères</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://simap.grenoble-inp.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-89889" type="direct"/>
            <relation active="#struct-341038" type="direct"/>
            <relation name="UMR5266" active="#struct-441569" type="direct"/>
            <relation active="#struct-445543" type="direct"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-761" status="OLD">
          <idno type="IdRef">184736579</idno>
          <idno type="ISNI">0000 0004 0386 4138</idno>
          <idno type="RNSR">199512057G</idno>
          <idno type="ROR">https://ror.org/014n97s28</idno>
          <orgName>Laboratoire des matériaux et du génie physique</orgName>
          <orgName type="acronym">LMGP</orgName>
          <date type="end">2019-12-31</date>
          <desc>
            <address>
              <addrLine>Grenoble INP Minatec - 3 parvis Louis Néel - CS 50257- 38016 Grenoble Cedex 1</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.lmgp.grenoble-inp.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-89889" type="direct"/>
            <relation active="#struct-300275" type="direct"/>
            <relation active="#struct-341038" type="direct"/>
            <relation name="UMR5628" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-89889" status="OLD">
          <idno type="IdRef">026388804</idno>
          <idno type="ROR">https://ror.org/05sbt2524</idno>
          <orgName>Institut polytechnique de Grenoble - Grenoble Institute of Technology</orgName>
          <orgName type="acronym">Grenoble INP</orgName>
          <date type="start">2007-01-01</date>
          <date type="end">2019-12-31</date>
          <desc>
            <address>
              <addrLine>46 avenue Félix Viallet 38031 Grenoble Cedex 1</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.grenoble-inp.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-341038" status="VALID">
          <idno type="IdRef">232435103</idno>
          <idno type="ISNI">000000010626358X</idno>
          <idno type="ROR">https://ror.org/02cte4b68</idno>
          <orgName>Institut de Chimie - CNRS Chimie</orgName>
          <orgName type="acronym">INC-CNRS</orgName>
          <date type="start">2009-10-01</date>
          <desc>
            <address>
              <addrLine>CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE3 rue Michel-Ange75794 PARIS CEDEX 16 - France</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.cnrs.fr/inc</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-445543" status="OLD">
          <idno type="IdRef">188399275</idno>
          <idno type="ROR">https://ror.org/02rx3b187</idno>
          <orgName>Université Grenoble Alpes [2016-2019]</orgName>
          <orgName type="acronym">UGA [2016-2019]</orgName>
          <date type="start">2016-01-01</date>
          <date type="end">2019-12-31</date>
          <desc>
            <address>
              <addrLine>38058 Grenoble cedex</addrLine>
              <country key="FR"/>
            </address>
          </desc>
        </org>
        <org type="institution" xml:id="struct-300275" status="OLD">
          <idno type="IdRef">026388804</idno>
          <orgName>Institut National Polytechnique de Grenoble</orgName>
          <orgName type="acronym">INPG</orgName>
          <date type="end">2006-12-31</date>
          <desc>
            <address>
              <addrLine>46 avenue Félix Viallet 38031 Grenoble Cedex 1</addrLine>
              <country key="FR"/>
            </address>
          </desc>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>