Integrated high Q optical cavity on a low loss Si suspended waveguide for THz application
Abstract
A free standing silicon waveguide with very low losses at THz frequencies is presented. By dry etching of an SOI wafer, the guiding channel is formed. This process allows to have a fully suspended Si (silicon) waveguide, where the air form it cladding. The absence of material as a cladding leads to have ultra-low losses. Another achievement of this work is also presented, where this guiding channel is etched in a way to form a high Q optical cavity.
Domains
Optics / Photonic
Origin : Files produced by the author(s)