Fracture resistance of Ti-Ag thin films deposited on polymeric substrates for biosignal acquisition applications
Résumé
The ability of magnetron sputtered Ti-Ag thin films deposited on polymeric substrate to be used as sensors for biosignal acquisition is investigated. Influence of the Ag content on the microstructure of TiAgx thin films prepared by magnetron sputtering is characterized by X-ray diffraction and electron microscopies. Three characteristic composition ranges are identified: Ti-rich, Ti-Ag and Ag-rich thin films. Their mechanical and electrical properties are then evaluated. Thin film fracture resistance on polymer substrate (polyethylene terephthalate) is studied by scanning electron microscopy micrographs performed during an in situ uniaxial stretching test. The key role of thin film composition and microstructure is highlighted, pointing out the positive effect of silver. © 2018 Elsevier B.V.
Mots clés
Binary alloys
Biosensors
Fracture
Fracture toughness
Magnetron sputtering
Microstructure
Plastic bottles
Polymers
Scanning electron microscopy
Substrates
Titanium alloys
Biomedical sensors
Fragmentation
In-situ electron microscopy
Magnetron-sputtering deposition
Mechanical and electrical properties
Polymeric substrate
Thin film composition
Uniaxial stretching
Thin films