<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-02392513</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-02T19:14:37+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Annealing of Boron-Doped Hydrogenated Crystalline Silicon Grown at Low Temperature by PECVD</title>
            <author role="aut">
              <persName>
                <forename type="first">Marta</forename>
                <surname>Chrostowski</surname>
              </persName>
              <idno type="halauthorid">1695764-0</idno>
              <affiliation ref="#struct-1070725"/>
              <affiliation ref="#struct-1165"/>
              <affiliation ref="#struct-447559"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">J</forename>
                <surname>Alvarez</surname>
              </persName>
              <email type="md5">b50fb1d187630ac6e6da06aef3ea26ee</email>
              <email type="domain">geeps.centralesupelec.fr</email>
              <idno type="idhal" notation="string">jose-alvarez</idno>
              <idno type="idhal" notation="numeric">5252</idno>
              <idno type="halauthorid" notation="string">24293-5252</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-3558-8302</idno>
              <idno type="IDREF">https://www.idref.fr/089018222</idno>
              <affiliation ref="#struct-542156"/>
              <affiliation ref="#struct-447559"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Alessia</forename>
                <surname>Le Donne</surname>
              </persName>
              <idno type="halauthorid">1734532-0</idno>
              <affiliation ref="#struct-575572"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Simona</forename>
                <surname>Binetti</surname>
              </persName>
              <idno type="halauthorid">1734533-0</idno>
              <affiliation ref="#struct-575572"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Pere</forename>
                <surname>Roca I Cabarrocas</surname>
              </persName>
              <idno type="idhal" notation="numeric">760063</idno>
              <idno type="halauthorid" notation="string">331572-760063</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-2241-2762</idno>
              <idno type="IDREF">https://www.idref.fr/034125663</idno>
              <affiliation ref="#struct-1165"/>
              <affiliation ref="#struct-447559"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Jose</forename>
                <surname>Alvarez</surname>
              </persName>
              <email type="md5">b50fb1d187630ac6e6da06aef3ea26ee</email>
              <email type="domain">geeps.centralesupelec.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2020-07-17 10:47:36</date>
              <date type="whenModified">2025-11-21 14:50:02</date>
              <date type="whenReleased">2020-07-23 13:20:04</date>
              <date type="whenProduced">2019-11</date>
              <date type="whenEndEmbargoed">2020-07-17</date>
              <ref type="file" target="https://hal.science/hal-02392513v1/document">
                <date notBefore="2020-07-17"/>
              </ref>
              <ref type="file" subtype="greenPublisher" n="1" target="https://hal.science/hal-02392513v1/file/materials-12-03795.pdf" id="file-2901417-2552121">
                <date notBefore="2020-07-17"/>
              </ref>
              <ref type="externalLink" target="https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6887746"/>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="322205">
                <persName>
                  <forename>Jose</forename>
                  <surname>Alvarez</surname>
                </persName>
                <email type="md5">b50fb1d187630ac6e6da06aef3ea26ee</email>
                <email type="domain">geeps.centralesupelec.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-02392513</idno>
            <idno type="halUri">https://hal.science/hal-02392513</idno>
            <idno type="halBibtex">chrostowski:hal-02392513</idno>
            <idno type="halRefHtml">&lt;i&gt;Materials&lt;/i&gt;, 2019, 12 (22), pp.3795. &lt;a target="_blank" href="https://dx.doi.org/10.3390/ma12223795"&gt;&amp;#x27E8;10.3390/ma12223795&amp;#x27E9;&lt;/a&gt;</idno>
            <idno type="halRef">Materials, 2019, 12 (22), pp.3795. &amp;#x27E8;10.3390/ma12223795&amp;#x27E9;</idno>
            <availability status="restricted">
              <licence target="https://about.hal.science/hal-authorisation-v1/">HAL Authorization<ref corresp="#file-2901417-2552121"/></licence>
            </availability>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="X">École polytechnique</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="UNIV-PSUD">Université Paris Sud - Paris XI</idno>
            <idno type="stamp" n="X-DEP-CHIM">Département de chimie de l’École polytechnique</idno>
            <idno type="stamp" n="X-DEP-PHYS">Département de physique de l’École polytechnique</idno>
            <idno type="stamp" n="LPICM" corresp="X">Laboratoire de physique des interfaces et des couches minces</idno>
            <idno type="stamp" n="CENTRALESUPELEC">Ecole CentraleSupélec</idno>
            <idno type="stamp" n="GEEPS" corresp="SORBONNE-UNIVERSITE">Laboratoire Génie électrique et électronique de Paris</idno>
            <idno type="stamp" n="PHEMADIC" corresp="GEEPS">Pôle Matériaux</idno>
            <idno type="stamp" n="UNIV-PARIS-SACLAY">Université Paris-Saclay</idno>
            <idno type="stamp" n="UNIV-PSUD-SACLAY" corresp="UNIV-PARIS-SACLAY">Université Paris Sud pour Paris Saclay</idno>
            <idno type="stamp" n="CENTRALESUPELEC-SACLAY" corresp="UNIV-PARIS-SACLAY">CENTRALESUPELEC-SACLAY</idno>
            <idno type="stamp" n="SORBONNE-UNIVERSITE">Sorbonne Université</idno>
            <idno type="stamp" n="SORBONNE-UNIV" corresp="SORBONNE-UNIVERSITE">Sorbonne Université 01/01/2018</idno>
            <idno type="stamp" n="SU-SCIENCES" corresp="SORBONNE-UNIVERSITE">Faculté des Sciences de Sorbonne Université</idno>
            <idno type="stamp" n="IP_PARIS">Institut Polytechnique de Paris</idno>
            <idno type="stamp" n="GEEPS-MATERIAU">Equipe Matériaux du GeePs</idno>
            <idno type="stamp" n="SU-TI">Sorbonne Université - Texte Intégral</idno>
            <idno type="stamp" n="GS-ENGINEERING">Graduate School Sciences de l'Ingénierie et des Systèmes</idno>
            <idno type="stamp" n="GS-PHYSIQUE">Graduate School Physique</idno>
            <idno type="stamp" n="INSTITUT-SCIENCES-LUMIERE">Institut des Sciences de la Lumière</idno>
            <idno type="stamp" n="ALLIANCE-SU"> Alliance Sorbonne Université</idno>
            <idno type="stamp" n="SUPRA_INGENIERIE">Ingénierie</idno>
            <idno type="stamp" n="IP-PARIS-PHYSIQUE">IP Paris Département de Physique</idno>
            <idno type="stamp" n="IP-PARIS-CHIMIE-ET-PROCEDES">IP Paris Département de Chimie et Procédés</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Annealing of Boron-Doped Hydrogenated Crystalline Silicon Grown at Low Temperature by PECVD</title>
                <author role="aut">
                  <persName>
                    <forename type="first">Marta</forename>
                    <surname>Chrostowski</surname>
                  </persName>
                  <idno type="halauthorid">1695764-0</idno>
                  <affiliation ref="#struct-1070725"/>
                  <affiliation ref="#struct-1165"/>
                  <affiliation ref="#struct-447559"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">J</forename>
                    <surname>Alvarez</surname>
                  </persName>
                  <email type="md5">b50fb1d187630ac6e6da06aef3ea26ee</email>
                  <email type="domain">geeps.centralesupelec.fr</email>
                  <idno type="idhal" notation="string">jose-alvarez</idno>
                  <idno type="idhal" notation="numeric">5252</idno>
                  <idno type="halauthorid" notation="string">24293-5252</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-3558-8302</idno>
                  <idno type="IDREF">https://www.idref.fr/089018222</idno>
                  <affiliation ref="#struct-542156"/>
                  <affiliation ref="#struct-447559"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Alessia</forename>
                    <surname>Le Donne</surname>
                  </persName>
                  <idno type="halauthorid">1734532-0</idno>
                  <affiliation ref="#struct-575572"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Simona</forename>
                    <surname>Binetti</surname>
                  </persName>
                  <idno type="halauthorid">1734533-0</idno>
                  <affiliation ref="#struct-575572"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Pere</forename>
                    <surname>Roca I Cabarrocas</surname>
                  </persName>
                  <idno type="idhal" notation="numeric">760063</idno>
                  <idno type="halauthorid" notation="string">331572-760063</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-2241-2762</idno>
                  <idno type="IDREF">https://www.idref.fr/034125663</idno>
                  <affiliation ref="#struct-1165"/>
                  <affiliation ref="#struct-447559"/>
                </author>
              </analytic>
              <monogr>
                <idno type="halJournalId" status="VALID">105815</idno>
                <idno type="issn">1996-1944</idno>
                <title level="j">Materials</title>
                <imprint>
                  <publisher>MDPI</publisher>
                  <biblScope unit="volume">12</biblScope>
                  <biblScope unit="issue">22</biblScope>
                  <biblScope unit="pp">3795</biblScope>
                  <date type="datePub">2019-11</date>
                </imprint>
              </monogr>
              <idno type="doi">10.3390/ma12223795</idno>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <keywords scheme="author">
                <term xml:lang="en">silicon epitaxy</term>
                <term xml:lang="en">PECVD</term>
                <term xml:lang="en">B-H complexes</term>
              </keywords>
              <classCode scheme="halDomain" n="phys.cond">Physics [physics]/Condensed Matter [cond-mat]</classCode>
              <classCode scheme="halDomain" n="spi.mat">Engineering Sciences [physics]/Materials</classCode>
              <classCode scheme="halTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halOldTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halTreeTypology" n="ART">Journal articles</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>We investigate low-temperature (&lt;200 • C) plasma-enhanced chemical vapor deposition (PECVD) for the formation of p-n junctions. Compared to the standard diffusion or implantation processes, silicon growth at low temperature by PECVD ensures a lower thermal budget and a better control of the doping profile. We previously demonstrated the successful growth of boron-doped epitaxial silicon layers (p+ epi-Si) at 180 • C. In this paper, we study the activation of boron during annealing via dark conductivity measurements of p+ epi-Si layers grown on silicon-on-insulator (SOI) substrates. Secondary Ion Mass Spectroscopy (SIMS) profiles of the samples, carried out to analyze the elemental composition of the p+ epi-Si layers, showed a high concentration of impurities. Finally, we have characterized the p+ epi-Si layers by low-temperature photoluminescence (PL). Results revealed the presence of a broad defect band around 0.9 eV. In addition, we observed an evolution of the PL spectrum of the sample annealed at 200 • C, suggesting that additional defects might appear upon annealing.</p>
            </abstract>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="regroupinstitution" xml:id="struct-1070725" status="VALID">
          <idno type="IdRef">267450761</idno>
          <idno type="Wikidata">Q154037</idno>
          <orgName>TotalEnergies</orgName>
          <orgName type="acronym">[Total Energies. Anciennement : Total, TotalFina, TotalFinaElf]</orgName>
          <date type="start">1924-03-28</date>
          <desc>
            <address>
              <addrLine>TotalEnergies – Tour Coupole 2, place Jean Millier – Arche Nord – Coupole/Regnault 92078 Paris La Défense Cedex – France</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.totalenergies.fr/</ref>
          </desc>
        </org>
        <org type="laboratory" xml:id="struct-1165" status="VALID">
          <idno type="IdRef">197372244</idno>
          <idno type="ISNI">0000000403702315</idno>
          <idno type="RNSR">199719345V</idno>
          <idno type="ROR">https://ror.org/023f9y602</idno>
          <idno type="Wikidata">Q30262273</idno>
          <orgName>Laboratoire de Physique des Interfaces et des Couches Minces</orgName>
          <orgName type="acronym">LPICM</orgName>
          <desc>
            <address>
              <addrLine>Route de Saclay 91128 Palaiseau Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://lpicm.cnrs.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-300340" type="direct"/>
            <relation active="#struct-563936" type="indirect"/>
            <relation name="UMR7647" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-447559" status="VALID">
          <orgName>Institut Photovoltaïque d’Ile-de-France (ITE)</orgName>
          <orgName type="acronym">IPVF</orgName>
          <date type="start">2014-01-01</date>
          <desc>
            <address>
              <addrLine>18, Boulevard Thomas Gobert 91120 Palaiseau France</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.ipvf.fr/</ref>
          </desc>
        </org>
        <org type="laboratory" xml:id="struct-542156" status="OLD">
          <idno type="IdRef">152859241</idno>
          <idno type="RNSR">199812843Y</idno>
          <orgName>Laboratoire Génie électrique et électronique de Paris</orgName>
          <orgName type="acronym">GeePs</orgName>
          <date type="start">2019-01-01</date>
          <date type="end">2019-12-31</date>
          <desc>
            <address>
              <addrLine>11, rue Joliot CuriePlateau de Moulon91192 Gif sur Yvette</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://geeps.lgep.supelec.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-92966" type="direct"/>
            <relation active="#struct-411575" type="direct"/>
            <relation active="#struct-413221" type="direct"/>
            <relation name="UMR8507" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-575572" status="VALID">
          <orgName>Milano-Bicocca Solar Energy Research Center</orgName>
          <orgName type="acronym">MIB-SOLAR</orgName>
          <desc>
            <address>
              <addrLine>via Cozzi 55, I-20125 Milano</addrLine>
              <country key="IT"/>
            </address>
          </desc>
          <listRelation>
            <relation active="#struct-60273" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-300340" status="VALID">
          <idno type="IdRef">027309320</idno>
          <idno type="ISNI">0000000121581279</idno>
          <idno type="ROR">https://ror.org/05hy3tk52</idno>
          <idno type="Wikidata">Q273626</idno>
          <orgName>École polytechnique</orgName>
          <orgName type="acronym">X</orgName>
          <date type="start">1794-03-11</date>
          <desc>
            <address>
              <addrLine>Route de Saclay, 91128 Palaiseau Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.polytechnique.edu/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-563936" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-563936" status="VALID">
          <idno type="IdRef">238327159</idno>
          <idno type="ISNI">0000000502717600</idno>
          <idno type="ROR">https://ror.org/042tfbd02</idno>
          <idno type="Wikidata">Q48759778</idno>
          <orgName>Institut Polytechnique de Paris</orgName>
          <orgName type="acronym">IP Paris</orgName>
          <date type="start">2019-06-02</date>
          <desc>
            <address>
              <addrLine>Route de Saclay, 91120 Palaiseau Cedex, France</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.ip-paris.fr</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-92966" status="OLD">
          <idno type="ROR">https://ror.org/028rypz17</idno>
          <orgName>Université Paris-Sud - Paris 11</orgName>
          <orgName type="acronym">UP11</orgName>
          <date type="end">2019-12-31</date>
          <desc>
            <address>
              <addrLine>Bâtiment 300 - 91405 Orsay cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.u-psud.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-411575" status="VALID">
          <idno type="IdRef">184443237</idno>
          <idno type="ROR">https://ror.org/019tcpt25</idno>
          <orgName>CentraleSupélec</orgName>
          <desc>
            <address>
              <addrLine>3, rue Joliot Curie,Plateau de Moulon,91192 GIF-SUR-YVETTE Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.centralesupelec.fr</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-413221" status="VALID">
          <idno type="IdRef">221333754</idno>
          <idno type="ROR">https://ror.org/02en5vm52</idno>
          <orgName>Sorbonne Université</orgName>
          <orgName type="acronym">SU</orgName>
          <date type="start">2018-01-01</date>
          <desc>
            <address>
              <addrLine>21 rue de l’École de médecine - 75006 Paris</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.sorbonne-universite.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-60273" status="VALID">
          <idno type="IdRef">097494496</idno>
          <idno type="ROR">https://ror.org/01ynf4891</idno>
          <orgName>Università degli Studi di Milano-Bicocca = University of Milano-Bicocca</orgName>
          <orgName type="acronym">UNIMIB</orgName>
          <date type="start">1998-06-10</date>
          <desc>
            <address>
              <addrLine>Piazza dell'Ateneo Nuovo, 1 - 20126, Milano</addrLine>
              <country key="IT"/>
            </address>
            <ref type="url">https://www.unimib.it/</ref>
          </desc>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>