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Communication Dans Un Congrès Année : 2016

Ultrafast laser micro- and nanoprocessing of dielectrics with Bessel beams

Résumé

Bessel beams provide a novel route for ultrafast laser processing of solid dielectrics. This is because even at high intensity, they do not undergo nonlinear distortions and allow uniform energy deposition along the beam path. We will review benefits of Bessel -like beams for laser micro and nano-structuring of transparent materials with high aspect ratio: glass and sapphire cutting, high aspect ratio void formation. Of particular interest is the impact of the transverse beam shape and polarization on the control of stress and cracks in glass and sapphire, leading to cleavage after single pass illumination.
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Dates et versions

hal-02380323 , version 1 (26-11-2019)

Identifiants

  • HAL Id : hal-02380323 , version 1

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François Courvoisier, Rémi Meyer, Ludovic Rapp, Ismail Ouadghiri Idrissi, Remo Giust, et al.. Ultrafast laser micro- and nanoprocessing of dielectrics with Bessel beams. SPIE Photonics West, Feb 2016, San Francisco, United States. ⟨hal-02380323⟩
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