Ultrafast laser micro- and nanoprocessing of dielectrics with Bessel beams
Résumé
Bessel beams provide a novel route for ultrafast laser processing of solid dielectrics. This is because even at high intensity, they do not undergo nonlinear distortions and allow uniform energy deposition along the beam path. We will review benefits of Bessel -like beams for laser micro and nano-structuring of transparent materials with high aspect ratio: glass and sapphire cutting, high aspect ratio void formation. Of particular interest is the impact of the transverse beam shape and polarization on the control of stress and cracks in glass and sapphire, leading to cleavage after single pass illumination.