High performance thin-film optical filters with stress compensation
Résumé
We present a thorough description of high performance thin-film optical filters with high flatness. These components can combine several tens or hundreds of layers and are manufactured using plasma-assisted reactive magnetron sputtering. Stress compensation is achieved using dual side coatings with appropriate spectral function. Examples of highly reflecting mirrors at 515 nm with 15 nm flatness peak-to-valley over up to 75 mm diameter aperture, narrow bandpass filters and filters with broadband controlled transmission are described.
Domaines
Optique / photonique| Origine | Fichiers produits par l'(les) auteur(s) |
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