High-GF planar aluminium-silicon hybrid strain transducers - Archive ouverte HAL
Communication Dans Un Congrès Année : 2009

High-GF planar aluminium-silicon hybrid strain transducers

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hal-02345857 , version 1 (04-11-2019)

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A.C.H. Rowe, C. Renner, S. Arscott. High-GF planar aluminium-silicon hybrid strain transducers. 15th International Conference on Solid-State Sensors, Actuators and Microsystems. Transducers 2009, Jun 2009, Denver, United States. pp.264-267, ⟨10.1109/SENSOR.2009.5285512⟩. ⟨hal-02345857⟩
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