Microelectromechanical System Comprising a Deformable Portion and a Stress Sensor - Archive ouverte HAL
Brevet Année : 2009

Microelectromechanical System Comprising a Deformable Portion and a Stress Sensor

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Dates et versions

hal-02345851 , version 1 (04-11-2019)

Identifiants

  • HAL Id : hal-02345851 , version 1

Citer

S. Arscott. Microelectromechanical System Comprising a Deformable Portion and a Stress Sensor. United States, Patent n° : US20090301176A1. 2009. ⟨hal-02345851⟩
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