Fluidic assembly of hybrid MEMS: a GaAs-based microcantilever spin injector - Archive ouverte HAL
Article Dans Une Revue Journal of Micromechanics and Microengineering Année : 2010

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hal-02345810 , version 1 (04-11-2019)

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S. Arscott, Emilien Peytavit, Duong Vu, Alistair C. H. Rowe, Daniel Paget. Fluidic assembly of hybrid MEMS: a GaAs-based microcantilever spin injector. Journal of Micromechanics and Microengineering, 2010, 20 (2), pp.025023. ⟨10.1088/0960-1317/20/2/025023⟩. ⟨hal-02345810⟩
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