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Article Dans Une Revue Diamond and Related Materials Année : 2009

Experimental and kinetic studies of C–H–O plasmas for polycrystalline and nano-smooth diamond deposition

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Chimie Matériaux

Dates et versions

hal-02326561 , version 1 (22-10-2019)

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T. Gries, S. de Persis, L. Vandenbulcke, C. Met, J.L. Delfau, et al.. Experimental and kinetic studies of C–H–O plasmas for polycrystalline and nano-smooth diamond deposition. Diamond and Related Materials, 2009, 18 (5-8), pp.730-733. ⟨10.1016/j.diamond.2009.01.032⟩. ⟨hal-02326561⟩
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