<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-02324308</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-20T08:10:48+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Methodology for extraction of space charge density profiles at nanoscale from Kelvin probe force microscopy measurements</title>
            <author role="aut">
              <persName>
                <forename type="first">Christina</forename>
                <surname>Villeneuve-Faure</surname>
              </persName>
              <email type="md5">2f20b5ebe83990b32ac5597afc9cffc5</email>
              <email type="domain">laplace.univ-tlse.fr</email>
              <idno type="idhal" notation="string">christina-villeneuve-faure</idno>
              <idno type="idhal" notation="numeric">750668</idno>
              <idno type="halauthorid" notation="string">55234-750668</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-7959-2912</idno>
              <idno type="IDREF">https://www.idref.fr/193648210</idno>
              <orgName ref="#struct-217752"/>
              <affiliation ref="#struct-404574"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Laurent</forename>
                <surname>Boudou</surname>
              </persName>
              <email type="md5">52e9720b340a3cab3c0731a8b7ee9607</email>
              <email type="domain">laplace.univ-tlse.fr</email>
              <idno type="idhal" notation="string">laurent-boudou</idno>
              <idno type="idhal" notation="numeric">1117467</idno>
              <idno type="halauthorid" notation="string">616635-1117467</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-5339-2042</idno>
              <idno type="IDREF">https://www.idref.fr/060262117</idno>
              <orgName ref="#struct-217752"/>
              <affiliation ref="#struct-404574"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Kremena</forename>
                <surname>Makasheva</surname>
              </persName>
              <email type="md5">55704fcf598ffc9d67b21af3c54b18ec</email>
              <email type="domain">laplace.univ-tlse.fr</email>
              <idno type="idhal" notation="string">kremena-makasheva</idno>
              <idno type="idhal" notation="numeric">180338</idno>
              <idno type="halauthorid" notation="string">51773-180338</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-6113-3593</idno>
              <idno type="IDREF">https://www.idref.fr/178653187</idno>
              <orgName ref="#struct-441569"/>
              <affiliation ref="#struct-1075133"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Gilbert</forename>
                <surname>Teyssedre</surname>
              </persName>
              <email type="md5">0b0d8cc655aa20e5b44f803c984f5316</email>
              <email type="domain">laplace.univ-tlse.fr</email>
              <idno type="idhal" notation="string">gilbert-teyssedre</idno>
              <idno type="idhal" notation="numeric">180342</idno>
              <idno type="halauthorid" notation="string">2312521-180342</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-6684-0262</idno>
              <idno type="IDREF">https://www.idref.fr/103169547</idno>
              <orgName ref="#struct-441569"/>
              <affiliation ref="#struct-404574"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Kremena</forename>
                <surname>Makasheva</surname>
              </persName>
              <email type="md5">55704fcf598ffc9d67b21af3c54b18ec</email>
              <email type="domain">laplace.univ-tlse.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2019-11-01 12:34:50</date>
              <date type="whenModified">2025-11-04 03:15:13</date>
              <date type="whenReleased">2019-11-04 16:09:11</date>
              <date type="whenProduced">2017-12-15</date>
              <date type="whenEndEmbargoed">2019-11-01</date>
              <ref type="file" target="https://hal.science/hal-02324308v1/document">
                <date notBefore="2019-11-01"/>
              </ref>
              <ref type="file" subtype="author" n="1" target="https://hal.science/hal-02324308v1/file/2017-Nanotechnology-HAL%20version.pdf" id="file-2324308-2251232">
                <date notBefore="2019-11-01"/>
              </ref>
              <ref type="externalLink" target="https://hal.archives-ouvertes.fr/hal-02324308/file/2017-Nanotechnology-HAL%20version.pdf"/>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="68542">
                <persName>
                  <forename>Kremena</forename>
                  <surname>Makasheva</surname>
                </persName>
                <email type="md5">55704fcf598ffc9d67b21af3c54b18ec</email>
                <email type="domain">laplace.univ-tlse.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-02324308</idno>
            <idno type="halUri">https://hal.science/hal-02324308</idno>
            <idno type="halBibtex">villeneuvefaure:hal-02324308</idno>
            <idno type="halRefHtml">&lt;i&gt;Nanotechnology&lt;/i&gt;, 2017, 28 (50), pp.505701. &lt;a target="_blank" href="https://dx.doi.org/10.1088/1361-6528/aa9839"&gt;&amp;#x27E8;10.1088/1361-6528/aa9839&amp;#x27E9;&lt;/a&gt;</idno>
            <idno type="halRef">Nanotechnology, 2017, 28 (50), pp.505701. &amp;#x27E8;10.1088/1361-6528/aa9839&amp;#x27E9;</idno>
            <availability status="restricted">
              <licence target="https://about.hal.science/hal-authorisation-v1/">HAL Authorization<ref corresp="#file-2324308-2251232"/></licence>
            </availability>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="UNIV-TLSE3">Université de Toulouse</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="LAPLACE">Les productions scientifiques du laboratoire plasma et conversion d’énergie</idno>
            <idno type="stamp" n="LAPLACE_DSF" corresp="LAPLACE">Les productions scientifiques du groupe DSF du laboratoire plasma et conversion d’énergie</idno>
            <idno type="stamp" n="LAPLACE_SCIPRA" corresp="LAPLACE">Les productions scientifiques du groupe SCIPRA du laboratoire plasma et conversion d’énergie</idno>
            <idno type="stamp" n="TEST-HALCNRS">Collection test HAL CNRS</idno>
            <idno type="stamp" n="TOULOUSE-INP">Toulouse - INP</idno>
            <idno type="stamp" n="UNIV-UT3">Université Toulouse 3</idno>
            <idno type="stamp" n="UT3-INP">Université de Toulouse / Toulouse INP</idno>
            <idno type="stamp" n="UT3-TOULOUSEINP">Université de Toulouse / Toulouse INP</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Methodology for extraction of space charge density profiles at nanoscale from Kelvin probe force microscopy measurements</title>
                <author role="aut">
                  <persName>
                    <forename type="first">Christina</forename>
                    <surname>Villeneuve-Faure</surname>
                  </persName>
                  <email type="md5">2f20b5ebe83990b32ac5597afc9cffc5</email>
                  <email type="domain">laplace.univ-tlse.fr</email>
                  <idno type="idhal" notation="string">christina-villeneuve-faure</idno>
                  <idno type="idhal" notation="numeric">750668</idno>
                  <idno type="halauthorid" notation="string">55234-750668</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-7959-2912</idno>
                  <idno type="IDREF">https://www.idref.fr/193648210</idno>
                  <orgName ref="#struct-217752"/>
                  <affiliation ref="#struct-404574"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Laurent</forename>
                    <surname>Boudou</surname>
                  </persName>
                  <email type="md5">52e9720b340a3cab3c0731a8b7ee9607</email>
                  <email type="domain">laplace.univ-tlse.fr</email>
                  <idno type="idhal" notation="string">laurent-boudou</idno>
                  <idno type="idhal" notation="numeric">1117467</idno>
                  <idno type="halauthorid" notation="string">616635-1117467</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-5339-2042</idno>
                  <idno type="IDREF">https://www.idref.fr/060262117</idno>
                  <orgName ref="#struct-217752"/>
                  <affiliation ref="#struct-404574"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Kremena</forename>
                    <surname>Makasheva</surname>
                  </persName>
                  <email type="md5">55704fcf598ffc9d67b21af3c54b18ec</email>
                  <email type="domain">laplace.univ-tlse.fr</email>
                  <idno type="idhal" notation="string">kremena-makasheva</idno>
                  <idno type="idhal" notation="numeric">180338</idno>
                  <idno type="halauthorid" notation="string">51773-180338</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-6113-3593</idno>
                  <idno type="IDREF">https://www.idref.fr/178653187</idno>
                  <orgName ref="#struct-441569"/>
                  <affiliation ref="#struct-1075133"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Gilbert</forename>
                    <surname>Teyssedre</surname>
                  </persName>
                  <email type="md5">0b0d8cc655aa20e5b44f803c984f5316</email>
                  <email type="domain">laplace.univ-tlse.fr</email>
                  <idno type="idhal" notation="string">gilbert-teyssedre</idno>
                  <idno type="idhal" notation="numeric">180342</idno>
                  <idno type="halauthorid" notation="string">2312521-180342</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-6684-0262</idno>
                  <idno type="IDREF">https://www.idref.fr/103169547</idno>
                  <orgName ref="#struct-441569"/>
                  <affiliation ref="#struct-404574"/>
                </author>
              </analytic>
              <monogr>
                <idno type="halJournalId" status="VALID">16523</idno>
                <idno type="issn">0957-4484</idno>
                <idno type="eissn">1361-6528</idno>
                <title level="j">Nanotechnology</title>
                <imprint>
                  <publisher>Institute of Physics</publisher>
                  <biblScope unit="volume">28</biblScope>
                  <biblScope unit="issue">50</biblScope>
                  <biblScope unit="pp">505701</biblScope>
                  <date type="datePub">2017-12-15</date>
                </imprint>
              </monogr>
              <idno type="doi">10.1088/1361-6528/aa9839</idno>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <keywords scheme="author">
                <term xml:lang="en">KPFM</term>
                <term xml:lang="en">dielectric thin film</term>
                <term xml:lang="en">space charge measurement</term>
              </keywords>
              <classCode scheme="halDomain" n="spi">Engineering Sciences [physics]</classCode>
              <classCode scheme="halTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halOldTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halTreeTypology" n="ART">Journal articles</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>To understand the physical phenomena occurring at metal/dielectric interfaces, determination of the charge density profile at nanoscale is crucial. To deal with this issue, charges were injected applying a DC voltage on lateral Al-electrodes embedded in a SiN x thin dielectric layer. The surface potential induced by the injected charges was probed by Kelvin probe force microscopy (KPFM). It was found that the KPFM frequency mode is a better adapted method to probe accurately the charge profile. To extract the charge density profile from the surface potential two numerical approaches based on the solution to Poisson's equation for electrostatics were investigated: the second derivative model method, already reported in the literature, and a new 2D method based on the finite element method (FEM). Results highlight that the FEM is more robust to noise or artifacts in the case of a non-flat initial surface potential. Moreover, according to theoretical study the FEM appears to be a good candidate for determining charge density in dielectric films with thicknesses in the range from 10 nm to 10 μm. By applying this method, the charge density profile was determined at nanoscale, highlighting that the charge cloud remains close to the interface.</p>
            </abstract>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="researchteam" xml:id="struct-404574" status="OLD">
          <orgName>Diélectriques Solides et Fiabilité</orgName>
          <orgName type="acronym">LAPLACE-DSF</orgName>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <addrLine>LAPLACE118 Route de Narbonne31062 TOULOUSE CEDEX 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.laplace.univ-tlse.fr/Presentation-1431</ref>
          </desc>
          <listRelation>
            <relation active="#struct-266932" type="direct"/>
            <relation active="#struct-217752" type="indirect"/>
            <relation active="#struct-443875" type="indirect"/>
            <relation name="UMR5213" active="#struct-441569" type="indirect"/>
            <relation active="#struct-448187" type="indirect"/>
          </listRelation>
        </org>
        <org type="researchteam" xml:id="struct-1075133" status="OLD">
          <orgName>Sciences et Ingénierie des Plasmas Réactifs et des Arcs</orgName>
          <orgName type="acronym">LAPLACE-ScIPRA</orgName>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <addrLine>118, route de Narbonne 31062 Toulouse cedex 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.laplace.univ-tlse.fr/Presentation-1457</ref>
          </desc>
          <listRelation>
            <relation active="#struct-266932" type="direct"/>
            <relation active="#struct-217752" type="indirect"/>
            <relation active="#struct-443875" type="indirect"/>
            <relation name="UMR5213" active="#struct-441569" type="indirect"/>
            <relation active="#struct-448187" type="indirect"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-266932" status="OLD">
          <idno type="IdRef">188373616</idno>
          <idno type="ISNI">0000 0000 8999 4419</idno>
          <idno type="RNSR">200711882P</idno>
          <idno type="ROR">https://ror.org/02w5mvk98</idno>
          <orgName>LAboratoire PLasma et Conversion d'Energie</orgName>
          <orgName type="acronym">LAPLACE</orgName>
          <date type="start">2007-01-01</date>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <addrLine>118 Route de Narbonne 31062 TOULOUSE CEDEX 9ENSEEIHT, 2 rue Camichel, 31071 Toulouse Cedex 7</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.laplace.univ-tlse.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-217752" type="direct"/>
            <relation active="#struct-443875" type="indirect"/>
            <relation name="UMR5213" active="#struct-441569" type="direct"/>
            <relation active="#struct-448187" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-217752" status="OLD">
          <idno type="IdRef">026404672</idno>
          <idno type="ISNI">0000000121617331</idno>
          <idno type="ROR">https://ror.org/02v6kpv12</idno>
          <idno type="Wikidata">Q1273188</idno>
          <orgName>Université Toulouse III - Paul Sabatier</orgName>
          <orgName type="acronym">UT3</orgName>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <addrLine>118 route de Narbonne - 31062 Toulouse</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-tlse3.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-443875" status="VALID">
          <idno type="ROR">https://ror.org/017tgbk05</idno>
          <orgName>Communauté d'universités et établissements de Toulouse</orgName>
          <orgName type="acronym">Comue de Toulouse</orgName>
          <desc>
            <address>
              <addrLine>41 Allée Jules Guesde, 31000 Toulouse</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.univ-toulouse.fr/</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-448187" status="VALID">
          <idno type="IdRef">026388820</idno>
          <idno type="ISNI">0000000121766169</idno>
          <idno type="ROR">https://ror.org/033p9g875</idno>
          <orgName>Institut National Polytechnique (Toulouse)</orgName>
          <orgName type="acronym">Toulouse INP</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.inp-toulouse.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>