Poster Communications
Year : 2018
Connect in order to contact the contributor
https://hal.science/hal-02311219
Submitted on : Thursday, October 10, 2019-5:02:02 PM
Last modification on : Wednesday, February 19, 2025-10:57:03 AM
Dates and versions
Identifiers
- HAL Id : hal-02311219 , version 1
Cite
Gaëlle Antoun, Thomas Tillocher, Philippe Lefaucheux, Remi Dussart. INTRODUCTION AU PROCÉDÉ DE GRAVURE CRYOGÉNIQUE DU SILICIUM. 15e Congrès de la Société Française de Physique Division Plasmas, Jun 2018, Bordeaux, France. ⟨hal-02311219⟩
Collections
66
View
0
Download