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Journal Articles Applied Surface Science Year : 1996

Preparation of TiO, thin films by pulsed laser deposition for waveguiding applications

Abstract

TiO, thin films have been deposited on SiO,/Si, MgO and Al,O, substrates by Pulsed Laser Deposition with a KrF excimer laser from a Wile ceramic target. From X-ray diffraction and Raman spectroscopy, their crystalline structure appear to be mainly anatase. The potentialities of waveguiding properties have been evaluated by measuring refractive index and thickness with m-line spectroscopy.
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hal-02296069 , version 1 (05-06-2020)

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C. Garapon, C. Champeaux, J. Mugnier, G. Panczer, P. Marchet, et al.. Preparation of TiO, thin films by pulsed laser deposition for waveguiding applications. Applied Surface Science, 1996, 96-98, pp.836 - 841. ⟨10.1016/0169-4332(95)00593-5⟩. ⟨hal-02296069⟩
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