Non-leaky longitudinal acoustic modes in ScxAl1-xN/sapphire structure for high-temperature sensor applications - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Applied Physics Letters Année : 2019

Non-leaky longitudinal acoustic modes in ScxAl1-xN/sapphire structure for high-temperature sensor applications

Résumé

Multilayered structures based on wide bandgap nitride piezoelectric thin films are very attractive for high-temperature surface acoustic waves (SAW) sensor applications. In this respect, scandium aluminium nitride (ScAlN) films are of particular interest as they combine enhanced piezoelectric properties and slower acoustic waves velocities when the Sc content steadily increases up to 40%. This property offers the possibility to combine slow ScAlN films on fast substrates like sapphire, to generate higher-order SAW modes which often show a better electromechanical coupling coefficient k 2 compared to zero-order modes. In this letter, we show that low-attenuated longitudinal SAW can be generated in ScxAl1-xN/Sapphire structure, for x parameter varying in a large range. This theoretical result is then confirmed by the experimental investigation of SAW resonators based on highly-textured (002) Sc0.09Al0.91N films sputtered on c-cut sapphire substrates. It is finally shown that the use of electrodes based on metals with high density can lead to SAW structures offering a unique combination between a large bandgap over 5 eV, a k 2 value beyond 1% and a high SAW velocity near 10000 m/s.
Fichier principal
Vignette du fichier
APL ScAlN_final.pdf (1.58 Mo) Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)
Loading...

Dates et versions

hal-02272689 , version 1 (28-08-2019)

Identifiants

Citer

Thierry Aubert, Natalya Naumenko, Florian Bartoli, Philippe Pigeat, Jérémy Streque, et al.. Non-leaky longitudinal acoustic modes in ScxAl1-xN/sapphire structure for high-temperature sensor applications. Applied Physics Letters, 2019, 115 (8), pp.083502. ⟨10.1063/1.5114871⟩. ⟨hal-02272689⟩
76 Consultations
183 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More