Characterization and modelling of the ion-irradiation induced disorder in 6H-SiC and 3C-SiC single crystals - Archive ouverte HAL
Article Dans Une Revue Journal of Physics D: Applied Physics Année : 2010

Characterization and modelling of the ion-irradiation induced disorder in 6H-SiC and 3C-SiC single crystals

Résumé

6H-SiC and 3C-SiC single crystals were simultaneously irradiated at room temperature with 100-keV Fe ions at fluences up to 4x10 13 cm-2 (~0.7 dpa), i.e. up to amorphization. The disordering behaviour of both polytypes has been investigated by means of Rutherford backscattering spectrometry in the channelling mode and synchrotron X-ray diffraction. For the first time, it is experimentally demonstrated that the general damage build-up is similar in both polytypes. At low dose, irradiation induces the formation of small interstitial-type defects. With increasing dose, amorphous domains start to form at the expense of the defective crystalline regions. Full amorphization of the irradiated layer is achieved at the same dose (~0.45 dpa) for both polytypes. It is also shown that the interstitial-type defects formed during the first irradiation stage induce a tensile elastic strain (up to ~3.8%) to which is associated an elastic energy. It is conjectured that this stored energy destabilizes the current defective microstructure observed at low dose and stimulates the formation of the amorphous nanostructures at higher dose. Finally, the disorder accumulation has been successfully reproduced with two models (namely MSDA and DI/DS). Results obtained from this modelling are compared and discussed in the light of experimental data.

Domaines

Matériaux
Fichier principal
Vignette du fichier
3C-6HSiC_JPD_final.pdf (1.22 Mo) Télécharger le fichier
Origine Fichiers produits par l'(les) auteur(s)
Loading...

Dates et versions

hal-02193735 , version 1 (24-07-2019)

Identifiants

Citer

A. Debelle, L. Thome, D Dompoint, Alexandre Boulle, F. Garrido, et al.. Characterization and modelling of the ion-irradiation induced disorder in 6H-SiC and 3C-SiC single crystals. Journal of Physics D: Applied Physics, 2010, 43 (45), pp.455408. ⟨10.1088/0022-3727/43/45/455408⟩. ⟨hal-02193735⟩
133 Consultations
183 Téléchargements

Altmetric

Partager

More